Silver Sintered Bonding Member with Additive Particles

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Solution Overview

Problem

Conventional semiconductor devices with silver sintered body bonding members experience significant void formation and reduced bonding strength when exposed to high temperatures for extended periods, leading to potential deterioration.

Innovation Solution

Incorporating additive particles with metal atoms having higher aggregation energy than silver atoms into the silver sintered body bonding members, such as tungsten oxide or tungsten carbide, to suppress silver atom diffusion and maintain bonding strength.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a bonding member is made of an Ag sintered body with only silver particles, then the manufacturing process is simple and cost-effective, but large voids form after prolonged high-temperature exposure leading to reduced bonding strength

Engineering Contradiction:
Improvebonding strengthVSAvoidbonding member composition
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The bonding member is constructed as a composite material consisting of silver particles combined with particles having higher aggregation energy than silver atoms (such as tungsten, molybdenum, or nickel particles). This composite structure prevents the formation of large voids during high-temperature storage while maintaining manufacturing feasibility, thereby resolving the contradiction between reliability and device complexity.

Inventive Principle:
Principle #40Composite materials

2Strength

If silver atoms are allowed to diffuse freely in the bonding member, then the material maintains good electrical conductivity, but large voids form reducing the mechanical bonding strength

Engineering Contradiction:
Improvebonding strengthVSAvoidsilver atom distribution
Core Design Contradiction:
StrengthVSStability of the object's composition

Solution Approach 1:

Particles with higher aggregation energy than silver atoms serve as intermediary elements that restrict silver atom diffusion. These particles act as anchors that prevent excessive silver atom movement during high-temperature storage, thereby preventing void formation while maintaining the electrical conductivity provided by the silver matrix.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Duration of action of moving object

If the bonding member is exposed to high temperatures for extended periods, then the semiconductor device can be processed and operated, but silver atom diffusion causes void formation and bonding strength degradation

Engineering Contradiction:
Improveservice lifeVSAvoidbonding strength
Core Design Contradiction:
Duration of action of moving objectVSReliability

Solution Approach 1:

Particles with higher aggregation energy are incorporated into the bonding member before high-temperature exposure to preemptively counteract silver atom diffusion. This preliminary anti-action prevents void formation from occurring in the first place during subsequent high-temperature storage or operation, thereby maintaining bonding strength throughout the service life.

Inventive Principle:
Principle #9Preliminary anti-action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Prevents the formation of large voids and maintains bonding strength even after prolonged high-temperature exposure, enhancing the durability of the bonding members.

Implementation Method 1

suppress silver atom diffusion

Methodology Applied
Scientific EffectDiffusion: Diffusion

Implementation Method 2

metal atom having aggregation energy higher than a silver atom

Methodology Applied
Scientific EffectAggregation energy:

Data Source

PatentUS10804237B2Semiconductor device
Publication Date: 2020.10.13 DENSO CORP
  • US10804237B2 patent drawing
  • US10804237B2 patent drawing
  • US10804237B2 patent drawing

AI summary

A semiconductor device includes: a mounting member having an electrode; a conductive member facing the electrode; and a bonding member electrically and mechanically connecting the electrode and the conductive member. The bonding member is made of a sintered body in which an additive particle including a metal atom having aggregation energy higher than a silver atom is added to an silver particle.