Simulated Image Analysis for Accurate 3D Shape Measurement

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing shape measurement devices face challenges in accurately setting measurement conditions due to variations in the relative position and attitude of the imager and object, leading to inconsistent imaging results.

Innovation Solution

A shape measurement device with a probe movement mechanism and holding/rotating device that adjusts the relative position and attitude of the optical probe and object, combined with an analysis device for setting and controlling measurement conditions, to ensure precise shape measurement.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the measurement condition is set in advance based on fixed relative position and attitude, then the imaging process is simple and fast, but the measurement accuracy deteriorates due to variations in imager-object configuration

Engineering Contradiction:
Improveimaging speedVSAvoidshape measurement accuracy
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The system performs preliminary simulation of measurement images under various measurement conditions before actual measurement. The analysis device generates simulated images based on different relative positions and attitudes of the imager, evaluates their appropriateness, and selects optimal measurement conditions in advance. This preliminary action enables both fast imaging execution and high measurement accuracy by pre-determining the best configuration.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system creates virtual copies of measurement images through simulation before capturing actual images. By generating and evaluating simulated images that replicate the expected measurement outcomes under different conditions, the system can identify optimal measurement parameters without performing actual measurements, thus ensuring both speed and accuracy.

Inventive Principle:
Principle #26Copying

2Measurement precision

If multiple measurement conditions are simulated and evaluated, then the measurement accuracy is improved, but the analysis time and computational load increase

Engineering Contradiction:
Improveshape measurement accuracyVSAvoidcondition evaluation time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The analysis device automatically evaluates multiple measurement conditions by comparing simulated images against evaluation criteria without requiring manual intervention. The system self-assesses the appropriateness of each measurement condition based on predefined standards, selecting the optimal configuration autonomously. This automation reduces the time penalty associated with evaluating multiple conditions while maintaining high measurement accuracy.

Inventive Principle:
Principle #25Self-service

3Measurement precision

If the relative position and attitude of the imager are adjusted to optimize measurement, then the measurement accuracy is improved, but the device complexity increases due to additional adjustment mechanisms

Engineering Contradiction:
Improveimaging accuracyVSAvoidprobe movement mechanism complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The system replaces complex mechanical adjustment mechanisms with computational methods. Instead of requiring physical adjustment of the imager's position and attitude through complex mechanical systems, the invention uses simulation and image analysis to determine optimal measurement conditions. The analysis device calculates the best relative position and attitude virtually, and the system executes measurements under these computationally-determined conditions, thereby achieving high accuracy without proportionally increasing mechanical complexity.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Data Source

PatentEP3760970B1Analysis device and method for detecting an improper image in a simulated image
Publication Date: 2025.11.12 NIKON CORP
  • EP3760970B1 patent drawingFigure 1
  • EP3760970B1 patent drawingFigure 2
  • EP3760970B1 patent drawingFigure 3A

AI summary

A measurement condition that enables accurate shape measurement can be set easily. An image analysis device includes an image analyzer 83 configured to detect, in a case of capturing an image of light projected onto an object to be measured, an improper image for shape measurement of the object to be measured, on the basis of design information on the object to be measured, and a measurement condition, and an output unit 88 configured to output detection result information that is information based on a detection result of the image analyzer 83.