SiN Spatial Light Modulators for Scalable Quantum Control

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Solution Overview

Problem

Current spatial light modulators (SLMs) are too slow for scalable quantum control due to limited response times and operate mainly at telecom or mid-infrared wavelengths, failing to meet the needs of quantum information processors, machine learning accelerators, and augmented reality technologies that require high-speed, large-scale SLMs in the visible and near-infrared range.

Innovation Solution

Development of high-speed programmable metasurface spatial light modulators using silicon nitride (SiN) photonic integrated circuits with piezoelectric actuators, such as AlN, enabling fast optical quantum control by straining resonant photonic devices, and incorporating dual-ring Mach-Zehnder modulators for high channel counts and GHz bandwidths.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If conventional spatial light modulators (liquid-crystal-on-silicon or digital micromirror devices) are used to control multiple optical channels, then the number of control channels can be increased to hundreds or thousands, but the response time becomes too slow (milliseconds to microseconds) for quantum control applications

Engineering Contradiction:
Improvenumber of optical control channelsVSAvoidresponse time
Core Design Contradiction:
Quantity of substanceVSSpeed

Solution Approach 1:

The patent replaces mechanical SLM systems (liquid crystal and digital micromirror devices) with an acousto-optic system using bulk acousto-optic devices. This substitution enables faster response times (microsecond scale) while maintaining the capability to control hundreds to thousands of optical channels, making the system suitable for quantum control applications.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent segments the optical control into multiple independent channels using an array of acousto-optic modulators. Each modulator can be independently controlled, allowing parallel manipulation of hundreds to thousands of optical channels simultaneously, thereby achieving both high channel count and fast response time.

Inventive Principle:
Principle #1Segmentation

2Reliability

If bulk acousto-optic devices are used for local addressing beam modulation, then quantum control can be achieved, but the system does not scale well beyond tens of optical control channels

Engineering Contradiction:
Improvequantum control capabilityVSAvoidnumber of scalable control channels
Core Design Contradiction:
ReliabilityVSQuantity of substance

Solution Approach 1:

The patent merges multiple acousto-optic modulators into a single integrated device structure. This combined system maintains the reliable quantum control capability of individual acousto-optic devices while scaling to control hundreds to thousands of optical channels simultaneously, overcoming the limitation of tens of channels.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent creates a universal acousto-optic modulation platform that can control a large number of optical channels across different wavelengths and applications. This multi-functional system can be used for quantum control, machine learning accelerators, LiDAR, and augmented/virtual reality technologies.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Temperature

If existing SLM technologies (III-V heterostructures, transparent conductive oxides, two-dimensional materials, phase-change materials, χ(2) nonlinear materials, liquid crystals, silicon photonics, and micro-electromechanical structures) are used, then modulation can be achieved at telecom or mid-infrared wavelengths, but the modulation rates remain low and visible/near-infrared operation is not achieved

Engineering Contradiction:
Improveoperating wavelength rangeVSAvoidmodulation rate
Core Design Contradiction:
TemperatureVSSpeed

Solution Approach 1:

The patent changes the operating parameters of acousto-optic devices to enable high-speed modulation in the visible and near-infrared wavelength ranges. By adjusting the acoustic frequency and optical wavelength parameters, the system achieves both high modulation rates (microsecond scale) and operation at visible/near-infrared wavelengths, unlike previous technologies limited to telecom or mid-infrared.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution provides high-speed modulation with GHz rates, enabling scalable quantum control of atomic qubits with high extinction and repeatability, suitable for quantum information processors and augmented reality, overcoming the limitations of existing SLMs.

Implementation Method 1

each of which includes a resonant photonic structure to reflect incident light at a resonance frequency and a piezoelectric actuator, in mechanical communication with the resonant photonic structure, to strain the resonant photonic structure

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

a resonant photonic structure to reflect incident light at a resonance frequency

Methodology Applied
Scientific EffectResonance: Resonance

Data Source

PatentUS12443870B2High-speed spatial light modulation and quantum control
Publication Date: 2025.10.14 MASSACHUSETTS INST OF TECH
  • US12443870B2 patent drawing
  • US12443870B2 patent drawing
  • US12443870B2 patent drawing

AI summary

An atom control architecture based on VIS-IR photonic integrated circuit (PIC) technology is characterized by (1) visible (VIS) and near-infrared (IR) wavelength operation, (2) channel counts extensible beyond 1000s of individually addressable atoms, (3) high intensity modulation extinction and (4) repeatability compatible with low gate errors, and (5) fast switching times. A 16-channel SiN-based APIC with (5.8±0.4) ns response times and <−30 dB extinction ratio at a wavelength of 780 nm. Based on a complementary metal-oxide-semiconductor (CMOS) fabrication process, this atom-control PIC (APIC) technology can be used for atomic, molecular, and optical physics and emerging applications, from quantum computers with cold atoms or ions to quantum networks with solid-state color centers. This APIC technology is especially suitable for scalable quantum information processing based on optically programmable atomic systems.