Single-Camera Prism Positioning for Thermal Drift Suppression
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Solution Overview
Problem
In ultra-high precision positioning, thermal expansion of optical components such as prisms, mirrors, and cameras causes optical path deviations, leading to decreased positioning accuracy.
Innovation Solution
A processing apparatus and method that utilize a prism with two reflection surfaces to reflect light from both the head and stage to a single camera, allowing for simultaneous imaging and positioning correction based on a single camera image, thereby minimizing thermal expansion effects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If separate optical systems are used for upper field of view and lower field of view, then positioning can be performed, but thermal expansion causes optical path deviation and decreases positioning accuracy
Solution Approach 1:
The patent merges the upper field of view optical system and lower field of view optical system into a single integrated optical system. The single optical system includes a single camera and single prism that can simultaneously capture images from both the upper field of view (first member) and lower field of view (second member), eliminating the optical path deviation caused by thermal expansion between separate systems
Solution Approach 2:
The patent introduces a prism as an intermediary component that reflects light from both the upper field of view and lower field of view to the single camera. This intermediary structure enables the single optical system to capture images from different fields of view without requiring separate optical paths, thereby suppressing thermal expansion effects
2Measurement precision
If multiple optical components are used for positioning, then positioning function is achieved, but device complexity increases and thermal expansion impacts positioning accuracy
Solution Approach 1:
The patent combines multiple optical components (separate cameras, prisms, mirrors) into a single integrated optical system with one camera and one prism, reducing device complexity while maintaining positioning functionality for both upper and lower fields of view
Solution Approach 2:
The single optical system serves multiple functions by simultaneously capturing images from both upper field of view and lower field of view using the single camera and prism, eliminating the need for separate optical systems and reducing overall device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach suppresses the decrease in positioning accuracy by reducing the number of components and minimizing thermal expansion impacts, ensuring precise alignment of members.
Implementation Method 1
the first reflection surface reflects light incident from a direction of the head toward the camera, and the second reflection surface reflects light incident from a direction of the stage toward the camera
Data Source
AI summary
A processing apparatus includes a positioning device, a head, and a stage. The positioning device includes a camera, a prism, and computation equipment, and the prism includes a first reflection surface and a second reflection surface. When the prism is disposed between the head and the stage, the first reflection surface reflects light incident from the direction of the head toward the camera, and the second reflection surface reflects light incident from the direction of stage toward the camera. On the basis of light incident from the prism, the camera captures a camera image including a first image that is an image of the side where the head is located and a second image that is an image of the side where the stage is located. The computation equipment determines the position of a first member and the position of a second member on the basis of the camera image.