Single-Crystal Diameter Correction Across Czochralski Batches
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Solution Overview
Problem
Manual calculation and setting of correction amounts for single crystal diameter measurement in the Czochralski method can lead to errors, reducing manufacturing yield.
Innovation Solution
A single crystal manufacturing system that automatically collects and manages diameter measurements from a pulling-up apparatus and a measuring apparatus, using a database server to calculate and correct diameter correction coefficients, thereby preventing manual calculation and setting mistakes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If manual calculation and setting of correction amounts is performed, then flexibility and adaptability are maintained, but calculation mistakes and setting mistakes occur reducing manufacturing yield
Solution Approach 1:
The system performs automatic correction amount calculation and setting without operator intervention. The correction amount calculation unit automatically computes the correction amount based on measurement data, and the setting unit automatically sets this calculated correction amount in the measurement system, eliminating manual operations and their associated errors
Solution Approach 2:
The manual mechanical process of calculation and setting is replaced by an automated information processing system. The correction amount calculation unit and setting unit form an automated control system that substitutes human operators, using computational algorithms to determine and apply correction amounts based on measurement data
2Measurement precision
If correction amounts are manually calculated and set for each batch, then measurement accuracy can be improved, but time consumption and operator burden increase
Solution Approach 1:
The system performs preliminary automatic calculation of correction amounts based on measurement data from previous batches. By automatically computing correction amounts in advance and setting them before the next measurement batch begins, the system eliminates time-consuming manual calculation while ensuring measurement accuracy is maintained
Solution Approach 2:
The correction amount calculation and setting process operates continuously across batches without interruption. Measurement data from each batch automatically feeds into the correction amount calculation unit, which continuously updates correction amounts that are immediately set for subsequent measurements, creating an unbroken cycle of measurement-calculation-correction
Data Source
AI summary
A system and method for producing a single crystal can prevent calculation and setting mistakes and provide an adequate correction amount in the next batch. A single crystal manufacturing system includes a pulling-up apparatus that calculates a diameter measurement value of a single crystal during a pulling-up process, calculates a first diameter of the single crystal by correcting the diameter measurement value using a diameter correction coefficient, and controls crystal pulling-up conditions based on the first diameter. A diameter measuring apparatus measures a diameter of the single crystal pulled up by the pulling-up apparatus to calculate a second diameter of the single crystal. A database server acquires the first diameter and the second diameter. The database server calculates a correction amount of the diameter correction coefficient from the first and second diameters obtained at diameter measurement positions which coincide with each other under room temperature.