Single Crystal Ingot Gas Atmosphere Control for Impurity Reduction

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Solution Overview

Problem

The rapid cooling of partial ingots during the single crystal growth process leads to sudden changes in crystallization rates, resulting in the formation of impurities in the crystal due to uneven heat radiation from the ingot to the cooled walls.

Innovation Solution

Introducing a controlled amount of gas into the chamber based on the ingot length to maintain a constant crystallization rate by evenly distributing the heat radiation from the partial ingot to the cooled walls, using a gas supply system regulated by a controller and ingot length measuring device.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If the partial ingot is allowed to radiate heat freely to the cooled walls under vacuum conditions, then the cooling process is efficient, but the crystallization rate changes suddenly and impurities are generated

Engineering Contradiction:
Improveheat radiation efficiencyVSAvoidcrystallization rate consistency
Core Design Contradiction:
Loss of energyVSManufacturing precision

Solution Approach 1:

A gas atmosphere (such as argon or nitrogen) is introduced as an intermediary medium between the partial ingot and the cooled walls. This gas atmosphere moderates the heat radiation process, preventing direct and rapid heat loss to the walls while maintaining efficient cooling. The gas acts as a buffer that distributes heat more uniformly, thereby maintaining consistent crystallization rate and preventing impurity formation.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Productivity

If the crystallization rate is increased to improve productivity, then more crystal is produced faster, but impurities are generated due to sudden cooling changes

Engineering Contradiction:
Improvecrystallization rateVSAvoidcrystal purity
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The system implements feedback control by continuously monitoring the length of the partial ingot and adjusting the gas flow rate accordingly. As the partial ingot grows longer, the gas flow rate is increased to maintain appropriate heat distribution. This feedback mechanism allows the crystallization rate to be maintained at optimal levels for high productivity while preventing the sudden cooling changes that cause impurities.

Inventive Principle:
Principle #23Feedback

3Manufacturing precision

If the gas flow rate is increased to maintain constant crystallization rate, then crystal purity is improved, but the system complexity increases

Engineering Contradiction:
Improvecrystallization rate consistencyVSAvoidgas flow control system
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The gas flow control system uses feedback from the partial ingot length measurement to automatically adjust the gas flow rate. This closed-loop control simplifies the overall system operation by eliminating the need for manual intervention, even though it adds control components. The automated feedback mechanism ensures consistent crystallization rate while managing the complexity through intelligent control rather than complex hardware.

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method ensures a consistent crystallization rate, reducing the formation of impurities in the single crystal by maintaining uniform cooling of the ingot, thereby enhancing the quality of the crystal growth process.

Implementation Method 1

Heat is then radiated from the partial ingot under vacuum conditions toward the cooling walls

Methodology Applied
Scientific EffectThermal radiation: Thermal Radiation

Implementation Method 2

An amount of gas is then introduced into the chamber which corresponds to a size of the partial ingot so as to provide a constant crystallization rate

Methodology Applied
Scientific EffectConvection: Convection

Data Source

PatentUS9234298B2Method and apparatus for reducing impurities in a single crystal based on ingot length
Publication Date: 2016.01.12 SIEMENS MEDICAL SOLUTIONS USA INC
  • US9234298B2 patent drawing
  • US9234298B2 patent drawing
  • US9234298B2 patent drawing

AI summary

A method for growing a single crystal in a chamber. The method includes heating raw material to form a melt for forming the single crystal. A crystal seed is then inserted into the melt and pulled from the melt to form a partial ingot, wherein the partial ingot radiates heat. An amount of gas is then introduced into the chamber which corresponds to a size of the partial ingot so as to provide a constant crystallization rate.