Single IR Light Source for Multi-Channel Projection Optics Heating

Solution Overview

Problem

The increasing number of segments requiring mirror preheating and sector heating in lithographic apparatuses leads to higher costs, complexity, and power consumption, as well as reduced availability due to the need for multiple laser light sources.

Innovation Solution

Implementing a single infrared (IR) light source for all preheaters and sector heaters, using radiation splitting and power control devices to distribute light to multiple channels, reducing the need for individual laser light sources.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If multiple laser light sources are used for mirror preheating and sector heating, then the heating coverage is sufficient, but the costs, complexity, and power consumption increase

Engineering Contradiction:

Improvemirror preheating temperatureVSAvoidnumber of laser light sources

Core Design Contradiction:

TemperatureVSDevice complexity

Solution Approach 1:

The patent divides the optical components into multiple segments (mirrors and sectors) that can be independently heated. Each segment receives dedicated heating radiation from the single light source through beam splitting, allowing targeted temperature control for each segment without requiring separate light sources

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent makes a single laser light source perform multiple functions by using beam splitting devices to distribute radiation to multiple heating zones. The single light source serves all mirror preheating and sector heating needs simultaneously, replacing what would traditionally require multiple separate light sources

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Temperature

If multiple laser light sources are used for mirror preheating and sector heating, then the heating coverage is sufficient, but the availability decreases

Engineering Contradiction:

Improvemirror preheating temperatureVSAvoidavailability of lithographic apparatus

Core Design Contradiction:

TemperatureVSReliability

Solution Approach 1:

The patent makes a single laser light source perform multiple functions by using beam splitting devices to distribute radiation to multiple heating zones. The single light source serves all mirror preheating and sector heating needs simultaneously, replacing what would traditionally require multiple separate light sources

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent implements independent power control for each heating channel, allowing real-time adjustment of heating power to each mirror and sector. This feedback control ensures optimal temperature maintenance while improving system availability through precise, adaptive heating management

Inventive Principle:

Principle #23Feedback

3Temperature

If multiple laser light sources are used for mirror preheating and sector heating, then the heating coverage is sufficient, but the power consumption increases

Engineering Contradiction:

Improvemirror preheating temperatureVSAvoidpower consumption of light sources

Core Design Contradiction:

TemperatureVSUse of energy by moving object

Solution Approach 1:

The patent makes a single laser light source perform multiple functions by using beam splitting devices to distribute radiation to multiple heating zones. The single light source serves all mirror preheating and sector heating needs simultaneously, replacing what would traditionally require multiple separate light sources

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent implements independent power control for each heating channel, allowing dynamic adjustment of heating power to each mirror and sector based on actual temperature requirements. This dynamic control optimizes energy distribution, ensuring each component receives only the necessary power rather than uniform high power to all components

Inventive Principle:

Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Reduces total costs, complexity, and power consumption while improving the availability of the lithographic apparatus by using a single IR light source with independent power control per channel.

Implementation Method 1

a radiation splitting system configured to generate a plurality of output radiation beams based on the input radiation beam

Methodology Applied

Scientific EffectOptical beam splitting: Reflection

Implementation Method 2

a plurality of heater head optics configured to heat the plurality of optical components

Methodology Applied

Scientific EffectRadiation heating: Heating

Data Source

PatentUS12461448B2Multi-channel light source for projection optics heating

Publication Date: 2025.11.04 ASML NETHERLANDS BV

AI summary

Systems, apparatuses, and methods are provided for heating a plurality of optical components. An example method can include receiving an input radiation beam from a radiation source. The example method can further include generating a plurality of output radiation beams based on the input radiation beam. The example method can further include transmitting the plurality of output radiation beams towards a plurality of heater head optics configured to heat the plurality of optical components. Optionally, the example method can further include controlling a respective power value, and realizing a flat-top far-field profile, of each of the plurality of output radiation beams.