EUV Source Material Conditioning With Single-Laser Pulse Delivery
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Solution Overview
Problem
Existing EUV light source systems require multiple laser pulses for droplet conditioning, which can increase system cost and complexity without optimizing pulse delivery.
Innovation Solution
A single laser system generates two pulses along a single axis using a beam splitter or optical deflector to deliver pulses at different times to the source material, allowing for optimized pulse delivery without additional complexity or cost.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple separate lasers are used to provide conditioning pulses and excitation pulses, then the system can achieve effective droplet conditioning and EUV production, but the system cost and complexity increase
Solution Approach 1:
The patent combines multiple laser functions into a single laser system. A single laser provides both the conditioning pulse (first pulse) and the excitation pulse (second pulse) for droplet processing. This merging eliminates the need for multiple separate lasers, thereby reducing system complexity and cost while maintaining the effectiveness of droplet conditioning and EUV production.
Solution Approach 2:
The single laser system is designed to perform multiple functions: generating the conditioning pulse to modify droplet properties and generating the excitation pulse to produce EUV radiation. This multi-functionality allows one device to replace what would traditionally require multiple specialized devices, simplifying the overall system architecture.
2Reliability
If multiple separate lasers are used to provide conditioning pulses and excitation pulses, then the system can achieve effective droplet conditioning and EUV production, but the system cost increases
Solution Approach 1:
The patent combines multiple laser functions into a single laser system. A single laser provides both the conditioning pulse (first pulse) and the excitation pulse (second pulse) for droplet processing. This merging eliminates the need for multiple separate lasers, thereby reducing system complexity and cost while maintaining the effectiveness of droplet conditioning and EUV production.
3Device complexity
If a single laser is used to generate multiple pulses, then the system complexity and cost are reduced, but the pulse delivery timing and positioning must be precisely controlled
Solution Approach 1:
The patent employs preliminary action by using optical deflectors to pre-position and time the delivery of pulses from the single laser system. The optical deflectors are configured to direct the conditioning pulse and excitation pulse to the droplet at precise moments and locations, ensuring proper timing and positioning control despite using a single laser source.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach simplifies the EUV light source system by using a single laser to generate multiple pulses, reducing system complexity and cost while maintaining effective droplet conditioning for efficient EUV production.
Implementation Method 1
The optical element may comprise a beam splitter, and the beam splitter may be a 50/50 beam splitter
Implementation Method 2
The optical deflector may comprise an electro-optic deflector
Implementation Method 3
The optical deflector may comprise an acousto-optic deflector
Implementation Method 4
In one such method, often termed laser produced plasma ('LPP'), the required plasma is produced by irradiating a source material
Implementation Method 5
the source material includes an element, for example, xenon, lithium, or tin, with an emission line in the EUV range
Data Source
AI summary
Disclosed is an apparatus and a method in which multiple, e.g., two or more pulses from a single laser source are applied to source material prior to application of a main ionizing pulse in which the multiple pulses are generated by a common laser source. The first pulse is directed towards the source material when the source material is at a first position and the second pulse is directed towards the source material when the source material is at a second position.