Single Mask Plate for GOA and Display Via-Holes

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Solution Overview

Problem

The production cost of Thin Film Transistor (TFT) liquid crystal panels increases due to the need for two separate mask plates to form via-holes in the Gate On Array (GOA) and display regions.

Innovation Solution

A single mask plate with distinct apertures for forming Gate Insulator (GI) via-holes at the GOA region and VIA via-holes at the display region, allowing both types of via-holes to be formed using the same plate, reducing the number of required mask plates and production costs.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If two separate mask plates are used to form via-holes in the GOA region and display region, then the via-holes can be formed with proper precision, but the production cost increases

Engineering Contradiction:

Improvevia-hole formation precisionVSAvoidproduction cost

Core Design Contradiction:

Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The patent combines two separate mask plates (GI mask plate for GOA region and VIA mask plate for display region) into a single integrated mask plate. This mask plate contains both a first aperture for forming GI via-holes in the GOA region and a second aperture for forming VIA via-holes in the display region, thereby reducing the number of mask plates from two to one and lowering production costs while maintaining via-hole formation precision

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The single mask plate performs multiple functions by incorporating different aperture types: the first aperture (with first light transmittance) forms GI via-holes in the GOA region, while the second aperture (with second light transmittance) forms VIA via-holes in the display region. This multi-functional design eliminates the need for separate specialized mask plates for each region

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Manufacturing precision

If two separate mask plates are used, then specific via-holes can be formed in different regions, but the manufacturing process complexity increases

Engineering Contradiction:

Improvevia-hole positioning accuracyVSAvoidmask plate quantity

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent merges the functionality of two separate mask plates into one integrated mask plate structure. The mask plate includes a first aperture configured for forming via-holes in the GOA region and a second aperture configured for forming via-holes in the display region, reducing the device complexity from two separate components to one unified component

Inventive Principle:

Principle #5Merging (Combining)

Data Source

PatentUS9905593B2Mask plate and method for manufacturing array substrate

Publication Date: 2018.02.27 BOE TECHNOLOGY GROUP CO LTD

AI summary

The present disclosure provides a mask plate, including a first region corresponding to a GOA region of an array substrate and a second region corresponding to a display region of the array substrate. The first region comprises at least one first aperture, the at least one first aperture is used to form a GI via-hole penetrating through a gate insulating layer at the GOA region, and a gate line is exposed through the GI via-hole. The second region comprises at least one second aperture, the at least one second aperture is a half-tone mask aperture and is used to form a VIA via-hole at the display region, and a source/drain metal layer pattern is exposed through the VIA via-hole.