Single Photon Detector Lock-In Thermography for Micron-Scale Defect Localization

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Solution Overview

Problem

Current thermographic inspection methods, such as lock-in thermography, face limitations in accurately localizing defects within devices due to low spatial resolution, especially in the z-axis, and inability to effectively time-tag individual photons for precise defect identification.

Innovation Solution

The use of an array of single low-noise photon detectors operating in Geiger mode, which timestamp each detected photon and correlate it with the excitation stimulus, allowing for the determination of time differences and generation of histograms to identify the origin of thermal hot-spots within devices, thereby enhancing spatial resolution to the micron scale.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional thermographic inspection methods are used, then the inspection can be performed with standard equipment, but the spatial resolution is low and defect localization is inaccurate

Engineering Contradiction:
Improvedefect localization precisionVSAvoiddetector system complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent changes the operational parameters of the detector system by operating single-photon detectors in Geiger mode at high frequencies (above 100 kHz), which enables precise time-tagging of photons and improves defect localization precision to the micron scale in the z-axis direction

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent segments the detection process by using arrays of independent single-photon detectors, each capable of timestamping individual photons. This segmentation allows parallel processing of photon signals from different spatial locations, achieving high-resolution defect localization without requiring a monolithic complex detector system

Inventive Principle:
Principle #1Segmentation

2Measurement precision

If high-frequency lock-in thermography is implemented, then defect localization precision is improved, but the device complexity increases due to single photon detectors operating in Geiger mode

Engineering Contradiction:
Improvespatial resolutionVSAvoiddetector operation complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent replaces conventional thermal camera systems with single-photon detectors operating in Geiger mode. This substitution enables the system to detect and timestamp individual photons, achieving micron-scale spatial resolution and high-frequency operation (above 100 kHz) that conventional mechanical thermal systems cannot achieve

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Loss of information

If conventional detectors are used, then the system is simpler to operate, but the ability to time-tag individual photons is lost, reducing defect identification accuracy

Engineering Contradiction:
Improvephoton timing informationVSAvoidsystem operation simplicity
Core Design Contradiction:
Loss of informationVSEase of operation

Solution Approach 1:

The patent implements preliminary action by having each single-photon detector in the array continuously timestamp photons as they are detected. This real-time timestamping captures photon timing information before any processing occurs, enabling subsequent correlation of photons with specific excitation cycles and defect identification without losing temporal information

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables more precise localization of defects by improving the timing fidelity and signal-to-noise ratio, allowing for accurate identification of defects at specific depths within devices, beyond the limitations of prior art systems.

Implementation Method 1

a detector that includes a number (e.g., an array) of single low-noise photon detectors operating in a Geiger mode (e.g., avalanche photodiodes, nanowire detectors, and superconducting single-photon detectors)

Methodology Applied
Scientific EffectPhotoelectric Effect: Photoelectric Effect

Implementation Method 2

a stimulation signal (i.e., power) is applied to a device. Photons resulting from the stimulation

Methodology Applied
Scientific EffectJoule Heating: Joule Heating

Data Source

PatentUS10768224B2High frequency lock-in thermography using single photon detectors
Publication Date: 2020.09.08 FEI CO
  • US10768224B2 patent drawing
  • US10768224B2 patent drawing
  • US10768224B2 patent drawing

AI summary

Systems, methods, and computer readable media to improve the operation of thermographic imaging systems are described. Techniques are disclosed for generating thermograms using single low-noise photon detectors. More particularly, an array of single low-noise photon detectors operating in the Geiger mode may be used to accurately identify the time delay between the application of a periodic power stimulus to a device under test and the generation of photons resulting from that stimulus. In one embodiment an array of single photon detectors may be used to time-tag each detected photon. Thereafter, a high-speed counting circuit can correlate the detected photons to the applied stimulus. When operating at the frequencies possible in the Geiger mode, such measurements permit a higher degree of spatial resolution (e.g., in the x, y and z axes) of thermal hot-spots within the device under test than prior art approaches.