Single Poly Non-Volatile Memory Device Area Reduction

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Solution Overview

Problem

Conventional single poly non-volatile memory devices have inefficiencies in erase operations due to separate tunneling and sensing transistor structures, which increase memory cell area and reduce erase efficiency.

Innovation Solution

A single poly non-volatile memory device design where a selection transistor, sensing transistor, and control gate are disposed in separate wells, with the control gate connected to the sensing transistor, forming a floating gate, and doping layers are used to improve operation efficiency and reduce area by sharing drain and source areas, allowing for efficient program and erase operations without high voltage processes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a separate tunneling area and sensing transistor structure is used, then the memory cell area increases, but the erase operation efficiency decreases

Engineering Contradiction:
Improveerase operation efficiencyVSAvoidmemory cell area
Core Design Contradiction:
Ease of manufactureVSArea of stationary object

Solution Approach 1:

The patent merges the tunneling area and sensing transistor into a single integrated structure. The sensing transistor is positioned such that its channel region directly overlaps with the tunneling area, eliminating the need for separate structures. This integration improves erase operation efficiency by reducing the distance electrons must travel while maintaining a compact memory cell area.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent utilizes vertical stacking to arrange components in three dimensions. The control gate is positioned above the sensing transistor channel, which is above the tunneling area, creating a vertical architecture. This dimensional arrangement increases functional density without proportionally increasing the planar area, resolving the contradiction between area and efficiency.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Device complexity

If the sensing transistor is disposed at the periphery of the source electrode, then the structure is simplified, but the substantial tunneling area reduces due to depletion area

Engineering Contradiction:
Improvestructure simplicityVSAvoidsubstantial tunneling area
Core Design Contradiction:
Device complexityVSArea of stationary object

Solution Approach 1:

The patent applies local quality by creating a heavily doped n-type region specifically at the interface between the source electrode and tunneling area. This localized doping modification reduces the depletion area effect at this critical location, maintaining a large substantial tunneling area while keeping the overall structure simple with the sensing transistor at the periphery.

Inventive Principle:
Principle #3Local quality

3Ease of manufacture

If conventional single poly structure is used with separate tunneling and sensing areas, then manufacturing is simplified, but production time increases due to additional high voltage processes

Engineering Contradiction:
Improveproduction process simplicityVSAvoidproduction time
Core Design Contradiction:
Ease of manufactureVSLoss of time

Solution Approach 1:

The patent extracts and eliminates the high voltage process step from the manufacturing sequence. By designing the single poly structure to function as both tunneling and sensing regions, the patent removes the need for separate high voltage element formation processes, thereby simplifying the manufacturing process and reducing production time while maintaining ease of manufacture.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enhances erase efficiency, reduces memory cell area, and simplifies production by eliminating the need for high voltage processes, thereby improving operational margins and data retention.

Implementation Method 1

a control gate formed in an upper portion of the second well with separated on an opposite side of the source electrode from the first well and connected to the gate of the sensing transistor

Methodology Applied
Scientific EffectFloating gate charge storage: Capacitance

Data Source

PatentUS11127749B2Single poly non-volatile memory device, method of manufacturing the same and single poly non-volatile memory device array
Publication Date: 2021.09.21 SK KEYFOUNDRY INC
  • US11127749B2 patent drawing
  • US11127749B2 patent drawing
  • US11127749B2 patent drawing

AI summary

A single poly non-volatile memory device that includes: a first type lower well; first and second wells separately formed in an upper portion of the first type lower well; a source electrode, a selection transistor, a sensing transistor, and a drain electrode sequentially disposed in an upper portion of the first well. A control gate is formed in an upper portion of the second well with separated on an opposite side of the source electrode from the first well and connected to the gate of the sensing transistor.