Single-Poly Non-Volatile Memory Cell Structure

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Solution Overview

Problem

Embedded non-volatile memory technologies face challenges in compatibility with existing logic processes, requiring additional masks and processes, which increase costs and complexity for small-volume applications.

Innovation Solution

The use of a single-poly non-volatile memory design that employs a voltage difference between a control line, bit line, and floating gate to generate the Fowler-Nordheim tunneling effect for electron absorption and expulsion, allowing for efficient programming and erasing operations within the existing logic process framework.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If additional masks and processes are used to manufacture embedded non-volatile memory, then the memory can be manufactured with existing logic process compatibility, but the manufacturing complexity and cost increase

Engineering Contradiction:
Improvecompatibility with existing logic processVSAvoidnumber of masks and processes
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent merges the non-volatile memory cell structure with the logic transistor structure by sharing the control gate and using the same poly-silicon layer for both the memory floating gate and the logic transistor gate. This integration allows the memory to be manufactured using the existing logic process without requiring additional masks or process steps, thereby reducing manufacturing complexity while maintaining compatibility with standard CMOS logic processes

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The control gate serves dual functions: it acts as the gate for the logic transistor and simultaneously forms the floating gate for the non-volatile memory cell. This multi-functionality enables a single structure to perform both logic operation and memory storage functions, eliminating the need for separate memory fabrication processes and reducing overall device complexity

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Reliability

If additional masks and processes are used to manufacture embedded non-volatile memory, then the memory functionality is achieved, but the manufacturing cost increases

Engineering Contradiction:
Improvememory functionalityVSAvoidmanufacturing cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent combines the memory cell fabrication with the logic transistor fabrication into a single unified process. By using the same poly-silicon deposition and patterning steps for both the logic gate and the memory floating gate, the invention eliminates redundant manufacturing steps, reduces material consumption, and lowers overall manufacturing costs while ensuring reliable memory functionality

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The existing logic process infrastructure and existing transistors are utilized to provide the necessary components for memory fabrication. The logic transistors themselves serve as part of the memory cell structure, and the existing process capabilities are leveraged to create the memory functionality without requiring additional specialized equipment or processes, thereby reducing manufacturing costs

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces the number of masks needed, enhances compatibility with existing logic processes, and improves the efficiency of programming and erasing operations, making it suitable for small-volume applications while maintaining cost-effectiveness.

Implementation Method 1

The present invention uses voltage difference between a control line, bit line and floating gate to generate the Fowler-Nordheim (FN) tunneling effect to absorb or expel electrons

Methodology Applied
Scientific EffectFowler-Nordheim tunneling:

Implementation Method 2

When the single-poly non-volatile memory of the present invention is executing a programming operation, by means of the positive voltage difference between the floating gate and the storage node, the electrons will be absorbed into the floating gate

Methodology Applied
Scientific EffectFowler-Nordheim tunneling:

Data Source

PatentUS7529132B2Single-poly non-volatile memory
Publication Date: 2009.05.05 EON SILICON SOLUTION
  • US7529132B2 patent drawing
  • US7529132B2 patent drawing
  • US7529132B2 patent drawing

AI summary

A single-poly non-volatile memory includes a storing node, a control node and a floating gate. While a programming operation is executed, a bit line is provided with a low voltage and a control line is provided with a high voltage so that a coupling voltage occurs in the floating gate. The voltage difference between the floating gate and the storing node is able to send electrons into the floating gate, but the voltage difference between the floating gate and the control node is not enough to expel electrons from the floating gate. While an erasing operation is executed, a bit line is provided with a high voltage and a control line is provided with a low voltage so that a coupling voltage occurs on the floating gate. The voltage difference between the floating gate and the storing node is able to expel electrons from the floating gate, but the voltage difference between the floating gate and the control node is not enough to send electrons into the floating gate.