Single Proof Mass MEMS Sensor for Multi-Axis Motion Detection
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Solution Overview
Problem
Existing microelectromechanical (MEMS) motion sensor devices with multiple mobile masses face manufacturing complexity, high costs, dimension constraints, cross-axis interferences, and reduced detection sensitivity.
Innovation Solution
A microelectromechanical motion sensor device with a single proof mass is designed, featuring a housing element with a cavity, an elastic supporting arrangement, and a sensing electrode arrangement. The device is configured to detect motion components along multiple sensing axes with reduced interference and increased sensitivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple mobile masses are used for sensing motion components along multiple axes, then the sensing capability and detection sensitivity are improved, but the manufacturing complexity and device dimensions increase
Solution Approach 1:
A single mobile mass is designed to sense motion components along multiple sensing axes simultaneously through its coupling with the elastic supporting arrangement and readout electrodes, eliminating the need for separate mobile masses for each axis while maintaining multi-axis sensing capability
Solution Approach 2:
Multiple sensing functions for different axes are merged into a single integrated sensing structure comprising one mobile mass, one elastic supporting arrangement, and shared readout electrodes, thereby reducing the total number of components and simplifying manufacturing
2Adaptability or versatility
If multiple mobile masses are used for sensing motion components along multiple axes, then the sensing capability is improved, but the device dimensions and associated costs increase
Solution Approach 1:
The single mobile mass serves multiple sensing functions by detecting motion components along different axes through its interaction with the elastic supporting arrangement and readout electrodes, providing versatile multi-axis sensing within a compact volume
Solution Approach 2:
The sensing capability is extended to multiple dimensions by configuring the elastic supporting arrangement and readout electrodes to detect motion components along different spatial axes using a single mobile mass, rather than requiring separate masses for each dimension
3Adaptability or versatility
If multiple mobile masses are used for sensing motion components, then the sensing coverage is improved, but cross-axis interferences between sensing axes occur
Solution Approach 1:
The elastic supporting arrangement is configured with asymmetric coupling characteristics that enable selective sensing of motion components along different axes while minimizing cross-axis interferences through careful design of the coupling elements and support structure
Solution Approach 2:
Different regions of the single mobile mass and elastic supporting arrangement are designed with specific local properties that enable selective response to motion along different axes, reducing cross-axis coupling and interference effects
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution simplifies manufacturing, reduces costs and dimensions, minimizes cross-axis interferences, and enhances detection sensitivity and signal-to-noise ratio, while maintaining high full-scale sensitivity and insensitivity to axis interferences.
Implementation Method 1
the mobile mass performing, due to an inertial effect, a respective sensing motion in response to each of the components of the motion quantity
Implementation Method 2
a sensing electrode arrangement, capacitively coupled to the mobile mass for sensing the components of the motion quantity
Data Source
AI summary
A microelectromechanical motion sensor device is described, provided with: a base substrate having a front surface with extension in a horizontal plane; and a sensing structure arranged above the base substrate, for sensing components of a motion quantity along respective sensing axes. The sensing structure is provided with: a housing element integrally coupled above the front surface of the base substrate and internally defining a cavity; a single mobile mass arranged inside the cavity; an elastic supporting arrangement arranged above the mobile mass, with main extension in a plane overlying the mobile mass to elastically support the mobile mass inside the cavity, so that it is suspended above the front surface of the base substrate and performs, due to inertial effect, a respective sensing movement in response to each of the components of the motion quantity; and a sensing electrode arrangement, capacitively coupled to the mobile mass for sensing the components of the motion quantity.