Singlet Lens Assembly for Broadband Radiation Collimation

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Solution Overview

Problem

Existing optical assemblies for controlling broadband radiation in lithographic and metrology processes face challenges due to complexity, alignment issues, and increased costs when attempting to handle a broad range of wavelengths, leading to inefficiencies and potential performance losses.

Innovation Solution

An assembly using a convex refractive singlet lens with a kinematic mount and optional chromatic doublet lens for collimating broadband radiation, optimized for wavelengths between 400 nm to 2400 nm, ensuring high coupling efficiency and stability under high power conditions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If additional optical elements are added to control broadband radiation, then control capability is improved, but device complexity and cost increase

Engineering Contradiction:
Improvecontrol capabilityVSAvoidoptical assembly complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

A single optical element (the convex refractive singlet lens) is designed to perform multiple functions: collimating broadband radiation across a wide wavelength range (400-2400 nm) while simultaneously managing chromatic dispersion through its specific geometric configuration. This eliminates the need for multiple specialized optical elements that would otherwise be required to achieve the same control capability.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent changes the geometric parameters of the optical element, specifically using a convex refractive singlet lens with carefully selected curvature radii for its surfaces. By optimizing these geometric parameters, the lens achieves effective collimation and dispersion control for broadband radiation without requiring additional optical elements, thus reducing system complexity while maintaining adaptability.

Inventive Principle:
Principle #35Parameter changes

2Adaptability or versatility

If additional optical elements are added to control broadband radiation, then control capability is improved, but manufacturing cost increases

Engineering Contradiction:
Improvecontrol capabilityVSAvoidmanufacturing cost
Core Design Contradiction:
Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The convex refractive singlet lens is designed as a universal optical element that handles broadband radiation control across 400-2400 nm wavelength range. This single multi-functional element replaces what would traditionally require multiple specialized components, directly reducing the bill of materials and assembly costs while maintaining comprehensive control capability.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent extracts and eliminates unnecessary optical elements from the traditional broadband radiation control system. By using a single convex refractive singlet lens with optimized geometry, the design removes redundant components that would increase manufacturing complexity and cost, achieving cost-effective broadband radiation control.

Inventive Principle:
Principle #2Taking out (Extraction)

3Device complexity

If a singlet lens is used for collimation, then device complexity is reduced, but chromatic dispersion increases

Engineering Contradiction:
Improveoptical assembly complexityVSAvoidcollimation precision
Core Design Contradiction:
Device complexityVSManufacturing precision

Solution Approach 1:

The patent changes the geometric parameters of the singlet lens, specifically using a convex configuration with carefully optimized curvature radii for both surfaces. This geometric parameter optimization compensates for the inherent chromatic dispersion of a singlet lens, achieving effective collimation precision across the broadband wavelength range without requiring a more complex multi-element lens system.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent specifies using low-dispersion glass materials for the convex refractive singlet lens. By selecting materials with favorable optical properties (low dispersion characteristics), the lens achieves better collimation precision across the broadband spectrum while maintaining the simplicity of a single-element design. The material composition compensates for the inherent limitations of a singlet configuration.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution provides efficient collimation and coupling of broadband radiation with high efficiency (>80%) and stability, reducing complexity and cost while maintaining performance across a wide wavelength range.

Implementation Method 1

a convex refractive singlet lens having a first spherical surface for coupling the broadband radiation into the lens, and a second spherical surface for coupling collimated broadband radiation out of the lens

Methodology Applied
Scientific EffectRefraction: Refraction

Data Source

PatentEP3789809B1Assembly for collimating broadband radiation
Publication Date: 2026.01.14 ASML NETHERLANDS BV
  • EP3789809B1 patent drawingFigure 1
  • EP3789809B1 patent drawingFigure 2~3
  • EP3789809B1 patent drawingFigure 4~5

AI summary

An assembly for collimating broadband radiation, the assembly comprising: a convex refractive singlet lens having a first spherical surface for coupling the broadband radiation into the lens and a second spherical surface for coupling the broadband radiation out of the lens, wherein the first and second spherical surfaces have a common centre; and a mount for holding the convex refractive singlet lens at a plurality of contact points having a centroid coinciding with the common centre.