Silicon Nitride Waveguide Optical Gyroscope Hybrid Phase Shifter

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Conventional fiber optical gyroscopes (FOGs) are large, expensive, and difficult to assemble due to the need for precise alignment of discrete optical components, making them challenging for volume production and integration into compact systems.

Innovation Solution

A multi-layer silicon nitride waveguide-based integrated photonics optical gyroscope with a rotation sensing element and a front-end chip, where the phase shifter can be fabricated on a separate material platform and hybridly integrated, allowing for a compact and scalable design with reduced vertical crosstalk and increased manufacturing efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If fiber optical gyroscopes are constructed using discrete optical components, then measurement precision is improved, but device complexity and ease of manufacture deteriorate due to the need for precise manual alignment

Engineering Contradiction:
ImproveprecisionVSAvoidease of assembly
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

The patent combines multiple discrete optical components (waveguides, phase shifters, modulators, detectors) into a single integrated photonic chip. This integration maintains the precise optical paths needed for measurement while eliminating manual alignment requirements, as all components are fabricated in fixed relative positions using semiconductor manufacturing processes.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent replaces mechanical alignment and assembly processes with photolithographic fabrication processes. Instead of manually positioning and aligning discrete components, all optical elements are patterned and integrated onto the chip using standard semiconductor manufacturing techniques, enabling automated high-volume production.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Measurement precision

If fiber optical gyroscopes use discrete optical components, then measurement precision is improved, but productivity deteriorates due to difficulty in volume production

Engineering Contradiction:
ImproveprecisionVSAvoidvolume production capability
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

By integrating all optical components onto a single chip, the system enables parallel fabrication of multiple units using semiconductor wafer processing techniques. This eliminates the sequential manual assembly required for discrete component systems, dramatically increasing production throughput and enabling cost-effective volume manufacturing.

Inventive Principle:
Principle #5Merging (Combining)

3Device complexity

If phase shifters are integrated on the same material platform as waveguides, then device complexity is reduced, but manufacturing precision deteriorates due to material compatibility constraints

Engineering Contradiction:
Improveintegration complexityVSAvoidfabrication precision
Core Design Contradiction:
Device complexityVSManufacturing precision

Solution Approach 1:

The patent employs a multi-layer composite material structure where silicon nitride waveguides are fabricated on one layer and piezoelectric phase shifters are deposited on a separate layer. This layered composite approach allows each material to be optimized for its specific function while maintaining precise spatial relationships through controlled deposition processes, achieving both integration and fabrication precision.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables the creation of compact, high-precision optical gyroscopes with reduced size, weight, and cost, suitable for applications like autonomous vehicles, by leveraging silicon nitride waveguides and hybrid integration of phase shifters, facilitating mass production and integration into inertial measurement units.

Implementation Method 1

Optical gyroscopes typically have the highest performance and are based on interferometric measurements and the Sagnac effect (a phenomenon encountered in interferometry that is elicited by rotation)

Methodology Applied
Scientific EffectSagnac effect: Sagnac Effect

Implementation Method 2

an integrated photonics optical gyroscope fabricated on a silicon nitride (SiN) waveguide platform comprises a first layer of silicon nitride (SiN) waveguides

Methodology Applied
Scientific EffectWaveguide: Waveguide (optics)

Implementation Method 3

Phase shifters can be of electro-optic materials such as lithium niobate or other polymers

Methodology Applied
Scientific EffectElectro-optic effect: Electro-Optic Effects

Implementation Method 4

Phase shifters can also be made of piezo-electric materials such as aluminum nitride (AlN) or strontium bismuth titanate (SBT)

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS11506494B2Silicon nitride waveguide based integrated photonics optical gyroscope chip with novel materials for phase shifter
Publication Date: 2022.11.22 ANELLO PHOTONICS INC
  • US11506494B2 patent drawing
  • US11506494B2 patent drawing
  • US11506494B2 patent drawing

AI summary

An integrated photonics optical gyroscope fabricated on a silicon nitride (SiN) waveguide platform comprises a first silicon nitride (SiN) waveguide layer that constitute a rotation sensing element; and, a second SiN waveguide layer with additional silicon nitride (SiN) waveguide-based optical components that constitute a front-end chip to launch light into and receive light from the rotation sensing element. The two SiN waveguide layers can be stacked together to have a multi-layer configuration vertically coupled with each other. External elements (e.g., laser, detectors, phase shifter) may be made of different material platform than SiN and can be hybridly integrated to the SiN waveguide platform. The phase shifters can be made of aluminum nitride (AlN) or strontium bismuth titanate (SBT).