Sintered material, connection structure, composite particle, joining composition, and method for manufacturing sintered material

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Solution Overview

Problem

Conventional sintered materials used as connection members in semiconductor devices face challenges in achieving both thermal stress relief and bonding strength, with porous structures compromising strength and dense layers reducing thermal stress relief effectiveness.

Innovation Solution

A sintered material comprising a metal base portion, buffer portions (pores or different materials), and filling portions (particles or fibers) is developed, where the kurtosis of the volume distribution is controlled to ensure both thermal stress relief and bonding strength, with the filling portions dispersing the buffer portions uniformly.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If pores are introduced in sintered material to relieve thermal stress, then thermal stress relief effect is improved, but bonding strength is reduced

Engineering Contradiction:
Improvethermal stress relief effectVSAvoidbonding strength
Core Design Contradiction:
ReliabilityVSStrength

Solution Approach 1:

The invention applies local quality by creating distinct regions within the sintered material: a first region with higher porosity (20-40%) for thermal stress relief and a second region with lower porosity (10-20%) for bonding strength. This spatial differentiation of material properties allows each region to optimize its function locally, resolving the contradiction between thermal stress relief and bonding strength.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The sintered material is segmented into multiple regions with different porosity characteristics. The first region (buffer portion) contains more pores for thermal stress absorption, while the second region (filling portion) has fewer pores for structural integrity. This segmentation allows the material to simultaneously achieve both thermal stress relief and bonding strength requirements.

Inventive Principle:
Principle #1Segmentation

2Strength

If a dense layer with low porosity is added to increase bonding strength, then bonding strength is improved, but thermal stress relief effect is reduced

Engineering Contradiction:
Improvebonding strengthVSAvoidthermal stress relief effect
Core Design Contradiction:
StrengthVSReliability

Solution Approach 1:

Rather than adding a separate dense layer as a distinct component, the invention segments the sintered material itself into regions with different porosity levels. The second region provides the necessary bonding strength while the first region maintains thermal stress relief, eliminating the need for additional layers and avoiding reduction in thermal stress relief effect.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention merges the functions of thermal stress relief and bonding strength enhancement into a single integrated sintered material structure. By controlling porosity distribution within the same material body, both functions are achieved simultaneously without requiring separate components, thus maintaining thermal stress relief effectiveness while providing adequate bonding strength.

Inventive Principle:
Principle #5Merging (Combining)

3Reliability

If porosity is increased to enhance thermal stress relief, then thermal stress relief effect is improved, but manufacturing complexity increases

Engineering Contradiction:
Improvethermal stress relief effectVSAvoidmanufacturing process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The invention controls porosity by adjusting sintering parameters (temperature, pressure, time) and particle size distribution of raw materials. By optimizing these manufacturing parameters, the desired porosity distribution (first region: 20-40%, second region: 10-20%) is achieved directly during the sintering process, avoiding complex post-processing steps and reducing manufacturing complexity.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The sintered material exhibits excellent thermal stress relief and bonding strength, making it suitable for semiconductor devices, with the composite particles used as raw materials to form the filling portions, enhancing the uniform distribution and affinity with the base material.

Implementation Method 1

the pores have an effect of relieving thermal stress

Methodology Applied
Scientific EffectThermal stress relief: Stress Relaxation

Implementation Method 2

a base portion, one or more buffer portions, and one or more filling portions, the base portion being a metal sintered body

Methodology Applied
Scientific EffectSintering: Sintering

Data Source

PatentUS11961815B2Sintered material, connection structure, composite particle, joining composition, and method for manufacturing sintered material
Publication Date: 2024.04.16 SEKISUI CHEMICAL CO LTD
  • US11961815B2 patent drawing
  • US11961815B2 patent drawing
  • US11961815B2 patent drawing

AI summary

A sintered material excellent in thermal stress and bonding strength; a connection structure containing the sintered material; a composition for bonding with which the sintered material can be produced; and a method for producing the sintered material. The sintered material has a base portion, buffer portions, and filling portions. The buffer portions and filling portions are dispersed in the base portion. The base portion is a metal sintered body, each buffer portion is formed from a pore and/or material that is not the same as the sintered body, and each filling portion is formed from particles and/or fibers. The sintered material satisfies A>B. A is the kurtosis of volume distribution of the base portions in a three-dimensional image of the sintered material. B is the kurtosis of volume distribution of the base portions in a three-dimensional image of the sintered material from which the filling portions are removed.