Porous sintered metal material, method, blend and use.

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Solution Overview

Problem

Existing porous sintered metal bodies used for filtering industrial fluids, particularly in semiconductor and microelectronic processing, face challenges in achieving high removal efficiency for sub-micron particles while maintaining low pressure drop and reduced thickness to accommodate increasing purity demands and smaller device sizes.

Innovation Solution

The development of novel porous sintered bodies with a metal matrix composed of elongate metal fibers connected by sintered metal nodes, formed from a blend of metal particles with different sintering points, allowing for high porosity and reduced thickness without compromising filtration efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the filter body is made thicker to achieve high particle removal efficiency, then the LRV increases, but the pressure drop increases proportionally

Engineering Contradiction:
Improveparticle removal efficiencyVSAvoidpressure drop
Core Design Contradiction:
ReliabilityVSStress or pressure

Solution Approach 1:

The patent employs a porous sintered metal structure with optimized porosity (30-70%) that allows high particle removal efficiency through extended surface area and multiple filtration paths while maintaining low pressure drop. The porous structure provides numerous flow paths that reduce resistance compared to dense thick filters.

Inventive Principle:
Principle #31Porous materials

Solution Approach 2:

The filter uses a composite structure combining metal fibers (60-90% by weight) with organic binder (10-40% by weight), creating a sintered composite material that achieves both mechanical strength and filtration performance. This composite approach allows thin filter design with high LRV by optimizing the combination of fiber content, binder content, and sintering parameters.

Inventive Principle:
Principle #40Composite materials

2Stress or pressure

If the filter body is made thinner to reduce pressure drop, then the pressure drop decreases, but the particle removal efficiency decreases

Engineering Contradiction:
Improvepressure dropVSAvoidparticle removal efficiency
Core Design Contradiction:
Stress or pressureVSReliability

Solution Approach 1:

The patent optimizes critical parameters including porosity (30-70%), metal fiber content (60-90%), binder content (10-40%), and sintering temperature to achieve the desired balance between thickness, pressure drop, and LRV. By precisely controlling these parameters, thin filters achieve high removal efficiency without proportionally increasing pressure drop.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention transitions from considering only filter thickness to optimizing multiple dimensions including porosity, surface area, fiber diameter distribution, and pore size distribution. This multi-dimensional optimization allows thin filters to achieve high LRV through increased surface area and optimized pore structure rather than relying solely on thickness.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Strength

If organic binder is used in the sintered body to form the metal matrix, then the structural integrity is improved, but outgassing occurs during filtration

Engineering Contradiction:
Improvestructural integrityVSAvoidoutgassing
Core Design Contradiction:
StrengthVSObject-generated harmful factors

Solution Approach 1:

The patent carefully controls binder content (10-40% by weight) and sintering temperature parameters to achieve complete binder combustion and removal. The sintering process is optimized to burn off organic materials completely, converting them to gaseous products that escape during the sintering cycle, leaving a fully inorganic, outgassing-free filter structure.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent converts the potential harm of organic binder (outgassing) into a benefit by using the binder as a sacrificial material during sintering. The binder combustion creates porosity and bonding between metal fibers while the organic material is completely removed, leaving no residual carbon or outgassing sources in the final filter product.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

These porous sintered bodies effectively filter gaseous flows with low pressure drop and high log reduction value (LRV) of at least 3, 5, 7, or 9, even at low gas velocities, making them suitable for high-purity applications in semiconductor and microelectronic processing.

Implementation Method 1

The porous sintered bodies effectively filter gaseous flows with low pressure drop and high log reduction value (LRV) of at least 3, 5, 7, or 9

Methodology Applied
Scientific EffectPhysical filtration: Filter (physical)

Implementation Method 2

The shaped article is removed from the mold, treated to remove the organic binder, followed by heating (i.e., sintering)

Methodology Applied
Scientific EffectSintering: Sintering

Data Source

PatentEP3706948B1Porous sintered metal material, method, blend and use.
Publication Date: 2025.05.21 ENTEGRIS INC
  • EP3706948B1 patent drawingFigure 1
  • EP3706948B1 patent drawingFigure 2
  • EP3706948B1 patent drawingFigure 3A

AI summary

Described are porous sintered metal bodies, methods of making and using the porous sintered metal bodies, and methods of using the porous sintered metal bodies for commercial applications that include filtering a fluid, including in applications requiring high efficiency (high LRV) filtration.