Sintered Metallic Layer for Thermal Stress Management in Semiconductor Packages

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Solution Overview

Problem

Semiconductor die integration into packages often results in thermal stresses that can lead to cracking or performance alterations, particularly in high-power devices, where existing solutions fail to adequately address the mechanical and thermal challenges.

Innovation Solution

A semiconductor die is attached to a thermally conductive substrate using a sintered metallic layer and a thermally conductive flow layer, which includes a solder material with a suitable melting point, to enhance heat dissipation and mechanical stability, thereby reducing stress and improving reliability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a semiconductor die is attached directly to a thermally conductive substrate using conventional methods, then the attachment process is simple, but thermal stresses cause cracking or performance alterations

Engineering Contradiction:
Improvedevice reliabilityVSAvoidattachment structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

A sintered metallic layer is introduced as an intermediary between the semiconductor die and the thermally conductive substrate. This intermediate layer acts as a stress buffer that accommodates differential thermal expansion, preventing cracking while maintaining thermal conduction pathways. The sintered metal layer absorbs thermal stresses that would otherwise transfer directly to the die, thereby improving reliability without excessive complexity.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The attachment structure employs composite materials comprising a sintered metallic layer with specific thermal and mechanical properties. This composite structure combines the thermal conductivity needed for heat dissipation with the mechanical flexibility required to manage thermal stresses, resolving the contradiction between reliability and complexity.

Inventive Principle:
Principle #40Composite materials

2Power

If high-power semiconductor devices are used to increase power output, then the power dissipation capability is improved, but thermal stresses increase leading to cracking

Engineering Contradiction:
Improvepower dissipation capabilityVSAvoidthermal stress
Core Design Contradiction:
PowerVSObject-affected harmful factors

Solution Approach 1:

The sintered metallic layer serves as a stress-absorbing intermediary that decouples the high-power die from the rigid substrate. This intermediate structure allows the device to handle higher power dissipation by preventing stress transfer, thereby enabling increased power output without proportionally increasing thermal stress damage.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The sintered metallic layer changes the mechanical and thermal parameters of the attachment interface. By adjusting the sintering process and material composition, the layer achieves optimal balance between thermal conductivity and stress absorption capacity, allowing high-power operation with reduced harmful thermal stresses.

Inventive Principle:
Principle #35Parameter changes

3Productivity

If conventional attachment methods are used to simplify the manufacturing process, then the manufacturing complexity is reduced, but production yield decreases due to cracking

Engineering Contradiction:
Improveproduction yieldVSAvoidmanufacturing process simplicity
Core Design Contradiction:
ProductivityVSEase of manufacture

Solution Approach 1:

The sintered metallic layer is applied to the die surface before final assembly, performing preliminary stress management. This preliminary action prevents cracking during subsequent packaging and operation, thereby improving production yield without requiring complex post-assembly interventions.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The sintering process transforms the metallic layer's physical parameters to achieve optimal attachment properties. By controlling sintering temperature, time, and atmosphere, the process achieves reliable attachment with reduced cracking, improving yield while maintaining reasonable manufacturing simplicity.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach increases the reliability and production yield of high-power semiconductor devices by effectively managing thermal and mechanical stresses, allowing for reliable attachment of gallium nitride and silicon die to copper flanges or lead frames, even with differing coefficients of thermal expansion.

Implementation Method 1

a sintered metallic layer disposed between the lower surface of the semiconductor die and the thermally conductive substrate

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

a thermally conductive flow layer disposed between the sintered metallic layer and coupling the sintered metallic layer and semiconductor die to the thermally conductive substrate

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 3

which includes a solder material with a suitable melting point

Methodology Applied
Scientific EffectMelting and solidification: Melting

Data Source

PatentUS9589860B2Electronic devices with semiconductor die coupled to a thermally conductive substrate
Publication Date: 2017.03.07 NXP USA INC
  • US9589860B2 patent drawing
  • US9589860B2 patent drawing
  • US9589860B2 patent drawing

AI summary

An electronic device includes a semiconductor die having a lower surface, a sintered metallic layer underlying the lower surface of the semiconductor die, a thermally conductive flow layer underlying the sintered metallic layer, and a thermally conductive substrate underlying the thermally conductive flow layer.