Diffusion Bonding Silicon Infiltrated SiC at High Temperature

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Solution Overview

Problem

Existing methods for joining silicon-infiltrated SiSiC materials, such as diffusion bonding, require precise surface polishing and flatness, making it difficult to achieve strong bonds with rough or uneven surfaces, and often result in weak joints due to limited material transport and the need for intermediate layers that affect properties.

Innovation Solution

The method involves performing diffusion bonding at high temperatures near the melting point of silicon (1330-1360 °C) to make silicon plastically deformable, allowing for compensation of surface unevenness and reducing the need for precise flatness and surface roughness, while maintaining dimensional stability, and is conducted in a vacuum or inert gas atmosphere with controlled contact pressure.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If traditional diffusion bonding is used at lower temperatures, then dimensional stability is maintained, but silicon remains brittle and cannot compensate for surface irregularities, resulting in weak bonds on rough surfaces

Engineering Contradiction:
Improvebond strengthVSAvoidsurface flatness
Core Design Contradiction:
StrengthVSManufacturing precision

Solution Approach 1:

The patent changes the temperature parameter to above silicon's melting point (1330-1360°C), transforming silicon from a brittle state to a plastically deformable state. This parameter change enables the silicon to flow and compensate for surface irregularities, achieving strong bonds without requiring high manufacturing precision of the surfaces

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent utilizes the phase transition of silicon from solid (brittle) to liquid/plastic state at temperatures above its melting point. This phase transition allows the silicon to become plastically deformable, enabling it to fill gaps and compensate for surface convexities, thereby achieving strong bonding on rough surfaces

Inventive Principle:
Principle #36Phase transitions

2Strength

If temperature is increased to make silicon plastically deformable, then surface irregularities are compensated, but dimensional stability may be compromised

Engineering Contradiction:
Improvebond strengthVSAvoiddimensional stability
Core Design Contradiction:
StrengthVSStability of the object's composition

Solution Approach 1:

The patent applies partial plastic deformation only to the silicon phase at the bonding interface, while maintaining overall dimensional stability of the component. The high temperature is applied locally and temporarily only during the bonding process, allowing the silicon to become plastically deformable for compensating surface irregularities, but the component returns to dimensional stability after cooling

Inventive Principle:
Principle #16Partial or excessive action

Solution Approach 2:

The patent performs preliminary surface treatment (lapping or polishing) to reduce surface roughness to a level that enables stable joining, then uses the high temperature process to compensate for remaining minor irregularities through silicon plastic deformation, achieving both surface preparation and irregularity compensation

Inventive Principle:
Principle #10Preliminary action

3Strength

If extensive polishing is performed to achieve high surface quality, then bond strength is improved, but manufacturing complexity and time increase

Engineering Contradiction:
Improvebond strengthVSAvoidsurface preparation complexity
Core Design Contradiction:
StrengthVSDevice complexity

Solution Approach 1:

The patent reduces surface preparation complexity by changing the temperature parameter to above silicon's melting point. This allows the process to tolerate higher surface roughness (up to 5 μm crowning per 100 mm) compared to traditional methods, significantly reducing or eliminating the need for extensive polishing while maintaining strong bonds

Inventive Principle:
Principle #35Parameter changes

4Strength

If intermediate layers are applied to enable joining of rougher surfaces, then bond strength is improved, but the joint properties are negatively affected

Engineering Contradiction:
Improvebond strengthVSAvoidjoint properties
Core Design Contradiction:
StrengthVSReliability

Solution Approach 1:

The patent removes the intermediate layer from the bonding process entirely. By increasing the temperature to above silicon's melting point, the process enables direct bonding of rough surfaces using the silicon itself as the bonding medium, eliminating the need for intermediate layers and preserving the inherent properties of the joint

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables strong bonding of rougher surfaces with minimal demands on flatness and surface roughness, forming a thin joint seam, reducing process time, and maintaining component stability, even for large-area components with significant crowning.

Implementation Method 1

the joining surfaces 'weld' together through the diffusion of individual silicon atoms

Methodology Applied
Scientific EffectDiffusion: Diffusion

Implementation Method 2

the temperature during diffusion bonding is therefore selected to be high enough that silicon becomes plastically deformable. Plastic deformation allows for the compensation of irregularities (e.g., convexity or deviations in parallelism) in the surface to be joined

Methodology Applied
Scientific EffectPlastic deformation: Plasticity

Data Source

PatentEP3259092B1Method of diffusion bonding of silicium infiltrated silicium carbide (SISIC)
Publication Date: 2019.11.13 CERAMTEC GMBH

AI summary

The invention relates to a method for joining silicon infiltrated silicon carbide SiSiC.