SIW Test Resonator for Non-Destructive Wideband Substrate Characterization

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Solution Overview

Problem

Existing substrate characterization techniques for high-frequency components, such as microwave and THz applications, require multiple resonators, additional feeding structures, and are often destructive, limiting their effectiveness in accurately characterizing dielectric properties across a wide frequency range.

Innovation Solution

A single trench-filled substrate integrated waveguide (SIW) resonator with a direct ground-signal-ground (GSG) coplanar waveguide probe-based calibration and measurement technique, allowing for non-destructive, ultra-wideband characterization of substrates and materials without additional feeding structures, using a commercially available GSG probe and vector/scalar network analyzer.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If multiple resonators and additional feeding structures are used for substrate characterization, then measurement precision is improved, but device complexity increases

Engineering Contradiction:
Improvesubstrate characterization accuracyVSAvoidnumber of resonators and feeding structures
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent combines multiple resonators into a single integrated resonator structure that can characterize substrates across a wide frequency range. The resonator includes a planar cavity with conductive layers and sidewall formations that create multiple resonant modes, eliminating the need for separate resonators for different frequency bands while maintaining measurement precision.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The single resonator is designed to perform multiple characterization functions across microwave, millimeter-wave, and THz frequency ranges. By adjusting resonant modes and using a unified structure with conductive layers and sidewalls, the resonator can characterize different dielectric properties without requiring additional specialized structures for each frequency band.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Measurement precision

If conventional SIW resonator techniques are used, then substrate characterization is achieved, but destructive processing is required

Engineering Contradiction:
Improvedielectric property characterizationVSAvoiddestructive processing
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The resonator structure is designed to be self-contained and non-destructive, using the substrate itself as the resonating medium. The conductive layers and sidewall formations create resonant modes that naturally interact with the substrate's dielectric properties without requiring destructive sampling or additional processing steps, allowing the substrate to serve its dual purpose as both test subject and test structure.

Inventive Principle:
Principle #25Self-service

3Measurement precision

If fence-via SIW resonator based characterisation is used, then high frequency characterization is achieved, but higher order mode propagation is limited

Engineering Contradiction:
Improvehigh frequency characterizationVSAvoidhigher order mode propagation
Core Design Contradiction:
Measurement precisionVSAdaptability or versatility

Solution Approach 1:

The patent transitions from two-dimensional fence-via structures to a three-dimensional resonator design with conductive layers at different heights and sidewall formations extending vertically. This dimensional enhancement creates additional resonant pathways and modes, enabling higher order mode propagation while maintaining high frequency characterization capabilities through the layered conductive architecture.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables accurate characterization of substrate and material properties across a wide frequency range, from microwave to THz, facilitating monitoring and control during fabrication and operation, with low loss and minimal overhead in substrate space or manufacturing cost.

Implementation Method 1

exciting electromagnetic oscillation within the test resonator; detecting one or more resonant properties of the test resonator

Methodology Applied
Scientific EffectResonance: Resonance

Data Source

PatentUS12007424B2Substrate and material characterisation method and device
Publication Date: 2024.06.11 SONY SEMICON SOLUTIONS CORP
  • US12007424B2 patent drawing
  • US12007424B2 patent drawing
  • US12007424B2 patent drawing

AI summary

A device comprises a planar substrate having conductive formations defining a substrate integrated waveguide test resonator; the test resonator comprising a three-dimensional region formed at least partly within the substrate having first and second planar conductive layers extending parallel to the plane of the substrate and one or more conductive sidewall formations perpendicular to the plane of the substrate defining a resonator side wall extending around the three-dimensional region; in which one of the first and second planar conductive layers comprises a test port comprising a conductive test connection electrically isolated from the rest of that planar conductive layer.