Six-DOF Tray Alignment for Precise Mask-Substrate Registration
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Solution Overview
Problem
Existing technologies face challenges in precisely aligning substrates and deposition masks during the manufacturing of flat panel display devices, leading to misalignment and inadequate patterning of thin films.
Innovation Solution
An alignment apparatus with a plate, connectors, supports, and drivers that allow for precise alignment of trays holding substrates, enabling six degrees of freedom movement and rotation, minimizing misalignment between substrates and masks.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a simple fixed mounting structure is used to hold the tray, then the device complexity is reduced, but the alignment precision between substrate and deposition mask deteriorates
Solution Approach 1:
The patent applies the dynamics principle by replacing a fixed mounting structure with a movable and rotatable mounting structure. The tray is equipped with a driver that enables it to move in six degrees of freedom (three translational and three rotational directions), allowing dynamic adjustment during the deposition process to achieve precise alignment between the substrate and deposition mask, thereby resolving the contradiction between structural simplicity and alignment precision
2Device complexity
If the tray is fixed in position, then the device complexity is reduced, but the alignment precision between substrate and mask deteriorates
Solution Approach 1:
The patent implements dynamics by enabling the tray to move and rotate in six degrees of freedom under the control of a driver, transforming the fixed positioning into a dynamically adjustable system that can achieve high alignment accuracy between substrate and mask during deposition
3Manufacturing precision
If a complex movable and rotatable mounting structure is used, then the alignment precision is improved, but the device complexity increases
Solution Approach 1:
The patent applies universality by designing a multi-functional driver assembly that integrates multiple functions into a single structure. The driver simultaneously controls movement in six degrees of freedom (translation in X, Y, Z directions and rotation about X, Y, Z axes), eliminating the need for separate adjustment mechanisms for each degree of freedom and thereby reducing overall device complexity while maintaining high alignment precision
Data Source
AI summary
An alignment apparatus according to the embodiments includes a plate, first to fourth connectors, first to third supports, a first driver, and a first holder. The first holder is configured to hold a tray on which a substrate is accommodated. The alignment apparatus may adjust a position and an angle of the tray in six degrees of freedom to more precisely align a mask and the substrate with each other.