Slab Amplifier Beam Profile and Polarization Alignment
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Solution Overview
Problem
Current extreme ultraviolet (EUV) light generation systems for semiconductor photolithography face challenges in efficiently amplifying laser beams to produce high-quality EUV light for forming small features, particularly due to limitations in beam profile and polarization alignment within slab amplification devices.
Innovation Solution
The implementation of a slab amplification device with beam adjusting optical units at input and output sides, including polarization direction and beam shape adjusting optical units, to optimize the laser beam profile and polarization for efficient amplification, ensuring alignment with the slab amplifier's free-space axis, thereby enhancing energy transfer and beam quality.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If beam adjusting optical units are added to the slab amplification device, then amplification efficiency and beam quality improve, but device complexity increases
Solution Approach 1:
The beam adjusting optical units are positioned at the input side of the slab amplifier to perform beam profile and polarization adjustments before the amplification process. This preliminary action ensures that the laser beam is optimally conditioned for amplification, improving efficiency without requiring complex adjustments during or after amplification.
Solution Approach 2:
Beam adjusting optical units serve as intermediary components between the laser source and the slab amplifier. These units mediate the beam characteristics by adjusting profile and polarization, enabling efficient energy transfer and high-quality output without directly modifying the slab amplifier structure.
2Manufacturing precision
If beam profile and polarization are optimized using adjusting optical units, then EUV light quality improves, but manufacturing complexity increases
Solution Approach 1:
The optical units perform preliminary optimization of beam profile and polarization before amplification, ensuring that the slab amplifier receives pre-conditioned light. This approach achieves high EUV light quality through standard optical components rather than requiring complex manufacturing of the amplifier itself.
3Use of energy by moving object
If multiple beam adjusting optical units are disposed at input and output sides, then energy transfer efficiency improves, but device complexity increases
Solution Approach 1:
Beam adjusting optical units at the input side perform preliminary optimization of beam profile and polarization before energy-intensive amplification. This ensures maximum energy transfer efficiency from the outset, reducing waste and improving overall system efficiency without requiring complex post-amplification adjustments.
Solution Approach 2:
The beam adjusting optical units act as intermediary components that optimize energy transfer between the laser source and slab amplifier, and between the amplifier and output. These mediators ensure efficient energy utilization through standard optical components rather than complex energy management systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration significantly improves the amplification efficiency of laser beams, ensuring optimal beam profiles and polarization directions, leading to higher-quality EUV light generation suitable for advanced semiconductor fabrication processes.
Implementation Method 1
polarization direction adjusting optical unit configured to convert the polarization direction of the laser beam
Implementation Method 2
beam shape adjusting optical unit configured to convert the beam profile of the laser beam
Data Source
AI summary
An EUV light generation system includes a driver laser comprising a master oscillator such as a semiconductor laser, a spatial filter, gas slab amplification devices, relay optical systems, and high-speed axial-flow amplifiers. The slab amplification devices include beam adjusting optical units disposed, respectively, at input and output sides of the slab amplifiers SA to convert the beam profile and/or polarization direction and/or an elongated direction of the beam profile with the slab amplifiers is parallel to a free space axis AF of the slab waveguides, i.e. parallel to the discharge electrodes.