Integrated Slab Laser Oscillator Amplifier for Compact EUV Sources
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Solution Overview
Problem
Current slab type laser apparatuses for extreme ultraviolet (EUV) light sources require a large installation area due to the separate configurations of the oscillator and amplifier modules, limiting their efficiency and compactness for industrial applications.
Innovation Solution
A slab type laser apparatus with an integrated oscillator and amplifier part, utilizing a slab type gas laser medium excited by high-frequency electric power, where the laser beam goes and returns multiple times between mirrors, enhancing amplification efficiency and focusing performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If separate oscillator and amplifier modules are used, then laser beam amplification can be achieved, but installation area increases
Solution Approach 1:
The patent merges the oscillator and amplifier modules into a single integrated laser apparatus. The oscillator generates the initial laser beam, and the amplifier immediately follows within the same device structure, eliminating the need for separate modules and reducing installation area while maintaining the required laser beam power for plasma generation.
Solution Approach 2:
The integrated laser apparatus performs multiple functions within a single device: it generates laser beams through oscillation, amplifies them through the amplifier module, and directs them for plasma generation. This multi-functional design reduces the overall system footprint while achieving the required power output.
2Power
If conventional laser apparatus configuration is used, then laser beam generation is achieved, but amplification efficiency is insufficient
Solution Approach 1:
The patent introduces a beam splitter as an intermediary optical element that efficiently directs the laser beam between the oscillator and amplifier modules. This intermediary component optimizes the beam path and minimizes energy loss during the amplification process, thereby improving overall amplification efficiency.
3Area of stationary object
If compact design is implemented, then installation area is reduced, but optical path length for amplification is insufficient
Solution Approach 1:
The patent employs mirrors and optical paths that utilize three-dimensional space efficiently. By folding the optical path using mirrors, the laser beam traverses a longer distance through the amplifier medium without increasing the physical footprint of the device, thus achieving sufficient amplification within a compact form factor.
Solution Approach 2:
The optical components are arranged in a nested configuration where mirrors and beam paths are positioned to maximize the use of available space. The beam splitter and mirrors create a compact optical arrangement that accommodates a longer effective optical path length within a reduced physical envelope.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration results in a compact, high-efficiency EUV generator with improved amplification efficiency and reduced space requirements, suitable for extreme ultraviolet light source applications.
Implementation Method 1
A slab type gas laser medium part to be formed in a region defined by a pair of electrode flat plates oppositely disposed in parallel with each other in a space to be filled with a gas laser medium, the gas laser medium being excited when high-frequency electric power is applied to the pair of electrode flat plates
Implementation Method 2
the amplifier part is configured such that a laser beam goes and returns plural times between the plurality of return mirrors
Implementation Method 3
an oscillator part including a pair of resonator mirrors oppositely disposed with a part of the slab type gas laser medium part in between, and a coupling unit, wherein the oscillator part amplifies a laser beam oscillated in the oscillator part
Data Source
AI summary
A slab type laser apparatus has a slab type gas laser medium part formed in a region defined by a pair of electrode flat plates oppositely disposed in parallel with each other in a space to be filled with a gas laser medium which is excited by high-frequency electric power. The apparatus includes an oscillator part including a pair of resonator mirrors oppositely disposed with a part of the gas laser medium part in between, and for amplifying a laser beam to have predetermined light intensity to emit the laser beam, and the amplifier part including a plurality of return mirrors oppositely disposed with a part of the gas laser medium part in between. The incident laser beam goes and returns plural times between the return mirrors, and the laser beam is amplified to have predetermined power.