Verifying Slanted Layout Components in Integrated Circuits

Solution Overview

Problem

Existing integrated circuit (IC) design and fabrication processes face challenges in verifying the layout of slanted layout components, which can lead to errors in spacing, pitch, and component dimensions, affecting the overall performance and reliability of the IC.

Innovation Solution

A system and method that involves detecting the offset angle of slanted layout components, rotating them to align with a base axis, and performing layout verification on the rotated components using design rule check (DRC) and other verification techniques.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If slanted layout components are used to enable flexible placement and routing, then design flexibility and area utilization are improved, but verification accuracy and manufacturing precision deteriorate due to errors in spacing, pitch, and component dimensions

Engineering Contradiction:

Improvedesign flexibilityVSAvoidspacing and pitch accuracy

Core Design Contradiction:

Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The system performs preliminary rotation of slanted layout components to align them with the base axis before verification. This preliminary action transforms the slanted components into upright orientations, allowing standard verification tools to accurately measure spacing and pitch without errors caused by angled geometries.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The rotation operation serves as an intermediary step between the slanted layout design and the verification process. By introducing this intermediate transformation, the system preserves the design flexibility of slanted components while enabling accurate verification through alignment with the base axis.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Measurement precision

If slanted layout components are rotated to align with base axis for verification, then measurement precision and verification accuracy are improved, but processing time and computational complexity increase

Engineering Contradiction:

Improveverification accuracyVSAvoidverification processing time

Core Design Contradiction:

Measurement precisionVSLoss of time

Solution Approach 1:

The verification process is segmented into distinct phases: first rotating only the slanted components that require alignment, then performing verification on the transformed components. This segmentation allows the system to apply rotation only where necessary rather than transforming the entire layout, reducing unnecessary computational overhead.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The system changes the orientation parameter of slanted layout components through rotation to align them with the base axis. This parameter transformation enables accurate verification while the rotation operation itself is computationally efficient, minimizing time addition.

Inventive Principle:

Principle #35Parameter changes

3Productivity

If layout verification is performed on slanted components directly, then processing speed is maintained, but verification reliability deteriorates due to errors in spacing, pitch, and component dimensions

Engineering Contradiction:

Improveverification speedVSAvoidverification reliability

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

The system performs preliminary rotation of slanted layout components to align them with the base axis before verification. This preliminary action transforms the slanted components into upright orientations, allowing standard verification tools to accurately measure spacing and pitch without errors caused by angled geometries.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The rotation operation serves as an intermediary step between the slanted layout design and the verification process. By introducing this intermediate transformation, the system preserves the design flexibility of slanted components while enabling accurate verification through alignment with the base axis.

Inventive Principle:

Principle #24Intermediary (Mediator)

Data Source

PatentUS20250165694A1System and method of verifying slanted layout components

Publication Date: 2025.05.22 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

AI summary

Disclosed herein are related to performing layout verification of a layout design of an integrated circuit having a slanted layout component. In one aspect, a slanted layout component having a side slanted from a base axis by an offset angle is detected. In one aspect, a first location of a vertex of the slanted layout component according to the offset angle is transformed to obtain a second location of a rotated vertex of a rotated layout component. In one aspect, layout verification is performed on the rotated layout component with respect to the base axis.