Slidable Buffer for Semiconductor Carrier Storage
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Solution Overview
Problem
The existing temporary storage apparatuses for semiconductor wafers or carriers in semiconductor fabrication equipment increase in height and space when a lateral transfer mechanism is provided, hindering installation and maintenance, and the slidable buffers protrude, obstructing equipment access.
Innovation Solution
A slidable buffer system that advances to a position under the travelling rail and retracts laterally, eliminating the need for a lateral transfer mechanism on the local vehicle, allowing easy installation and maintenance by rotating the guide mechanism out of the way, and a controller system notifies overhead vehicles to avoid interference during retraction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a lateral transfer mechanism is provided on the local vehicle to enable carrier transfer, then carrier transfer capability is improved, but the height of the local vehicle increases and more space is occupied
Solution Approach 1:
The lateral transfer mechanism is extracted from the local vehicle and relocated to the temporary storage apparatus. The slidable buffer on the temporary storage apparatus performs the lateral transfer function, allowing the local vehicle to maintain a compact profile while still achieving carrier transfer capability.
Solution Approach 2:
The transfer mechanism transitions from a vertical arrangement (on the local vehicle) to a horizontal arrangement (on the temporary storage apparatus). The slidable buffer moves carriers laterally in the horizontal dimension, eliminating the need for vertical space on the local vehicle.
2Quantity of substance
If the slidable buffer is positioned at the advanced position over the load port to increase storage capacity, then storage capacity is improved, but the slidable buffer protrudes and prevents installation and maintenance of equipment
Solution Approach 1:
The buffer is designed to be slidable rather than fixed, allowing it to dynamically change position. During normal operation, it extends to the advanced position over the load port to maximize storage capacity. During installation and maintenance, it retracts to clear the passage and provide access to equipment.
Solution Approach 2:
The slidable buffer retracts in advance before installation or maintenance activities begin, ensuring that the passage is clear and equipment is accessible. This preliminary retraction action prevents interference with subsequent installation or maintenance work.
3Ease of operation
If the slidable buffer is retracted to allow installation and maintenance, then accessibility is improved, but the storage capacity is reduced
Solution Approach 1:
The buffer system operates in two dynamic states: extended position during normal storage operations to maximize capacity, and retracted position during installation and maintenance to ensure accessibility. The system transitions between these states as needed.
Solution Approach 2:
The buffer periodically transitions between extended and retracted states based on operational requirements. It extends for storage operations and retracts for installation/maintenance operations, creating a periodic cycle that balances storage capacity and accessibility needs.
Data Source
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AI summary
A temporary storage apparatus is provided with a slidable buffer which does not prevent installation of the temporary storage apparatus and maintenance of equipment and has increased storing capacity for carriers without a lateral transfer mechanism in a local vehicle. The temporary storage apparatus stores carriers between overhead travelling vehicles and a load port. The temporary storage apparatus is provided with the local vehicle travelling on a travelling rail below the travelling rail for the overhead travelling vehicles and a slidable buffer comprising a cell to support a carrier thereon and a guide mechanism sliding the slidable buffer between an advanced position under the travelling rail and a backward position laterally shifted from the travelling rail. The guide mechanism is configured to move between an active position laterally protruding from the travelling rail and a retracted position allowing transfer by the overhead travelling vehicles between the load port. The travelling rail extends along the front face of the equipment to a waiting position separated from a position over the load port.