Slide Lock Gas Delivery System Assembly Flexibility
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Solution Overview
Problem
Current gas delivery systems for semiconductor fabrication require precise machining tolerances, are time-consuming to assemble, and can be expensive, while also facing challenges with heat management due to the use of aluminum mounting plates which act as heat sinks.
Innovation Solution
A modular gas delivery system with a slide lock mechanism that allows for flexible clamping and self-adjustment of manifold blocks to gas components, eliminating the need for precise mounting plates and enabling independent sealing plane establishment, while incorporating a heating element for temperature control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If tight machining tolerances are used to ensure alignment of ports, then sealing integrity is improved, but manufacturing complexity and cost increase
Solution Approach 1:
The mounting system transitions from a rigid fixed-position mounting to a dynamic adjustable mounting where the manifold substrate can be positioned and secured at different locations along the support rail. This allows the system to adapt to manufacturing tolerances while maintaining sealing integrity through the adjustable positioning mechanism comprising clamps and positioning elements.
Solution Approach 2:
The system changes the positional parameter of the manifold substrate relative to the support rail, allowing adjustment within a range rather than requiring a single precise fixed position. This parameter change enables the system to accommodate manufacturing variations in port alignment while maintaining effective sealing.
2Weight of moving object
If aluminum mounting plates are used to reduce weight, then weight is reduced, but heat management deteriorates due to heat sink effect
Solution Approach 1:
The mounting system is segmented into separate functional components: the support rail provides structural support and positioning, while heating elements provide thermal management. This segmentation allows the use of lightweight materials for the rail while adding thermal management capabilities through integrated heating elements, eliminating the heat sink problem of aluminum plates.
Solution Approach 2:
Heating elements are introduced as an intermediary component between the manifold substrate and the support rail. These heating elements actively compensate for heat loss and prevent condensation, transforming the thermal management approach from passive (relying on material properties) to active (using controlled heating).
3Manufacturing precision
If manual layout and assembly methods are used, then positioning accuracy can be achieved, but assembly time increases
Solution Approach 1:
The system incorporates self-aligning and self-adjusting features where the manifold substrate can be positioned along the rail and secured without requiring precise pre-positioning or complex alignment procedures. The adjustable clamps and positioning elements enable quick installation while maintaining positioning accuracy, allowing the assembly to essentially install itself without time-consuming manual layout.
4Stability of the object's composition
If fixed preload is applied to secure manifold blocks, then structural stability is improved, but adaptability during assembly deteriorates
Solution Approach 1:
The preload mechanism is made dynamic rather than fixed, allowing adjustment during assembly. The clamps can be positioned at different locations and applied with varying forces to accommodate different assembly stages and component variations. Once assembled, the system maintains stable preload to ensure sealing integrity during operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system simplifies assembly, reduces misalignment stress, and enhances heat management by allowing for flexible alignment and increased holding force, thus improving the efficiency and cost-effectiveness of gas delivery systems.
Implementation Method 1
The slide lock member is configured to secure the first and second manifold blocks to the rail under a first level of preload for assembly of the gas component to the manifold blocks, and to secure the first and second manifold blocks to the rail with a second level of preload greater than the first level when the gas component is secured to the manifolds
Implementation Method 2
These systems require a high degree of modularity, very good leak integrity and must occupy a very small footprint. A typical method of accomplishing these requirements is through a surface mount system... These gases used in the fabrication of semiconductor devices are often highly toxic or corrosive. Many of these materials are drawn as a vapor from a liquid source and must be heated to prevent the vapor from condensing back to a liquid form
Data Source
AI summary
A gas supply system that is easily assembled and/or installed and includes an initially flexible clamping system that allows for the gas supply system to adapt to the gas components. As the assembly of the gas components is complete, the clamping system becomes rigid thereby securing the gas components to a support rail. The slide lock gas delivery system allows a gas system component bottom surface to establish the sealing plane for the inlet and outlet seals independently. The lateral spacing for the gas component mounting holes float during assembly to reduce the opportunity for misalignment.