Slide and Pivot Assembly for Process Module Bias Access
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Solution Overview
Problem
Substrate processing systems face challenges in accessing process modules and processing chambers for maintenance due to limited space and restricted access, especially in densely arranged configurations, where existing solutions fail to provide efficient and repeatable mechanisms for pulling out and pivoting process module bias assemblies.
Innovation Solution
A slide and pivot assembly is introduced, comprising a slide torsion plate, rails and bearings, a bias mounting plate, and a hinge assembly that allows lateral sliding and pivoting of the process module, along with a motion interlock mechanism and jack screw assembly for precise control and alignment, enabling easy access and repeatable positioning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If the processing chamber is densely arranged with other chambers, then space utilization is improved, but access to the process module for maintenance becomes restricted
Solution Approach 1:
The bias assembly is designed with dynamic movement capability, transitioning from a fixed position to a movable configuration that can be pulled out laterally and pivoted. This allows the assembly to be accessed for maintenance when needed while maintaining a compact, space-efficient arrangement during normal operation.
Solution Approach 2:
The bias assembly is moved from a purely lateral extraction path to a two-dimensional movement path that includes both lateral sliding and vertical pivoting. This dimensional change enables the assembly to clear obstacles and reach maintenance positions that would be inaccessible through lateral movement alone, solving the access problem in densely arranged configurations.
2Device complexity
If a fixed bias assembly design is used, then structural simplicity is improved, but maintenance access and positioning flexibility deteriorate
Solution Approach 1:
The bias assembly incorporates a hinge mechanism that enables it to pivot between a retracted position (aligned with the processing chamber) and an extended maintenance position. This dynamic capability provides positioning flexibility for maintenance access while maintaining relatively simple structural components.
Solution Approach 2:
The slide and pivot assembly serves multiple functions: it enables lateral extraction for maintenance, provides vertical pivoting for positioning flexibility, and includes a motion interlock mechanism for safety. This multi-functionality addresses both maintenance access and positioning flexibility needs within a unified structural design.
3Device complexity
If manual adjustment methods are used for bias assembly positioning, then device simplicity is improved, but alignment precision and repeatability deteriorate
Solution Approach 1:
The motion interlock mechanism replaces manual positioning attempts with an automated mechanical system that uses a latch bar, catch bracket, and spring to automatically engage and lock the bias assembly in the correct position. This mechanical substitution ensures precise and repeatable alignment without requiring manual adjustment skills.
Solution Approach 2:
The motion interlock mechanism is designed to automatically engage and lock the bias assembly in the proper position during the pull-out and pivot sequence. The spring-loaded latch bar and catch bracket work together to self-align and secure the assembly, eliminating the need for manual positioning adjustments and ensuring consistent alignment precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The slide and pivot assembly facilitates easy access to process modules and processing chambers, allowing for efficient maintenance and service while ensuring precise alignment and repeatable positioning, even in densely arranged configurations, with the ability to handle heavy loads and compensate for sagging, thus improving operational efficiency and reducing recalibration needs.
Implementation Method 1
a hinge assembly attached to the slide torsion plate and the bias mounting plate. The slide torsion plate, the bias mounting plate and the hinge assembly are configured to slide via the one or more rails and bearings in a lateral direction relative to the processing chamber. The bias mounting plate is configured to pivot relative to the slide torsion plate
Implementation Method 2
one or more rails and bearings configured to attach to the slide torsion plate or a processing chamber
Implementation Method 3
a spring configured to rotate the latch bar relative to the attachment bar to a disengaged position when the slide torsion plate is in a pulled out state
Data Source
AI summary
A slide and pivot assembly for a process module bias assembly of a substrate processing system includes a slide torsion plate, one or more rails and bearings, a bias mounting plate, and a hinge assembly. The one or more rails and bearings are attached to the slide torsion plate or a processing chamber. The bias mounting plate is configured to hold a portion of a process module for processing a substrate. The hinge assembly is attached to the slide torsion plate and the bias mounting plate. The slide torsion plate, the bias mounting plate and the hinge assembly are configured to slide via the one or more rails and bearings in a lateral direction relative to the processing chamber. The bias mounting plate is configured to pivot relative to the slide torsion plate while the slide and pivot assembly is in at least a partially pulled out state.