Slide Rack Transfer Mechanism for Semiconductor Logistics

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Solution Overview

Problem

In semiconductor factories, existing temporary storage devices fail to efficiently transfer articles between overhead traveling vehicle systems and load ports, particularly when handling cassettes with different production-control attributes, leading to congestion and complex routing requirements.

Innovation Solution

A temporary storage device with a local carrier and slide rack that allows vertical passage between travel rails of an overhead traveling vehicle system and a second transport system, enabling articles to be transferred between different positions without interfering with normal article transport, using a hoist and slide rack that moves perpendicular to the travel rails.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If a separate transport system for hot lots is provided in addition to the normal article transport system, then express articles can be transported efficiently, but the system complexity and routing complexity increase

Engineering Contradiction:
Improvetransport efficiency of express articlesVSAvoidtransport system complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent merges the hot lot transport function into the existing normal article transport system by enabling the slide rack to selectively transfer articles to either the overhead traveling vehicle system or the second transport system. This consolidation eliminates the need for completely separate transport systems while maintaining the ability to prioritize express articles through selective routing via the slide rack's positional switching capability.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The slide rack is designed to be dynamically repositionable between a first position (for transferring to overhead traveling vehicle system) and a second position (for transferring to second transport system). This dynamic positioning allows the system to adapt its routing configuration based on the article type being transported, enabling efficient hot lot handling without requiring fixed separate infrastructure.

Inventive Principle:
Principle #15Dynamics

2Ease of operation

If the slide rack is positioned directly above the transfer position for overhead vehicle access, then normal article transfer is efficient, but hot lot transfer to second transport system becomes difficult

Engineering Contradiction:
Improveoverhead vehicle article transferVSAvoidhot lot transfer capability
Core Design Contradiction:
Ease of operationVSAdaptability or versatility

Solution Approach 1:

The slide rack's ability to dynamically switch between first and second positions enables it to serve multiple functions: when positioned at the first location directly above the transfer position, it facilitates efficient overhead vehicle access; when switched to the second position, it enables hot lot transfer to the second transport system. This dynamic reconfigurability resolves the spatial conflict between the two transfer requirements.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The solution adds a temporal dimension to the spatial arrangement by introducing positional switching capability. Instead of requiring two fixed positions simultaneously, the slide rack transitions between positions over time based on transfer requirements, effectively utilizing the time dimension to resolve the spatial conflict between overhead vehicle access and hot lot routing.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Adaptability or versatility

If branching and merging routes are provided for different article types, then selective transport is enabled, but the layout complexity and installation difficulty increase

Engineering Contradiction:
Improveselective article transportVSAvoidlayout and installation simplicity
Core Design Contradiction:
Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The slide rack is designed as a universal transfer mechanism that can handle both normal articles and hot lots by switching between two positions. Instead of requiring separate dedicated transfer mechanisms for different article types, this single multi-functional device performs both routing functions, thereby simplifying the overall layout and reducing installation complexity while maintaining selective transport capability.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables seamless transfer of articles with different production-control attributes, such as hot lots, between load ports and overhead traveling vehicle systems without causing congestion, simplifying the layout and eliminating the need for branching and merging routes, thus improving efficiency and reducing installation complexity.

Implementation Method 1

a local carrier capable of travelling, the local carrier including a hoist to raise and lower an article

Methodology Applied
Scientific EffectMechanical lifting: Mechanical Force

Implementation Method 2

a slide rack provided below the travel rails of the local carrier, the slide rack being slidable between a portion directly above the transfer position and a second position

Methodology Applied
Scientific EffectFriction-based sliding: Friction

Data Source

PatentUS9548230B2Temporary storage device, transport system, and temporary storage method
Publication Date: 2017.01.17 MURATA MASCH LTD
  • US9548230B2 patent drawing
  • US9548230B2 patent drawing
  • US9548230B2 patent drawing

AI summary

A temporary storage device transfers an article in different positions to and from an overhead travelling vehicle system and a second transport system, and transfers an article to and from an article transfer position outside the temporary storage device. The temporary storage device includes a local carrier including a hoist, travel rails of the local carrier below a travel rail of the overhead travelling vehicle system, passing directly above an article transfer position, and a slide rack below the travel rails of the local carrier, slidable between a portion directly above the transfer position and a second position in which an article can be transferred to and from the second transport system, the second position being different from the portion directly above the transfer position in a direction perpendicular or substantially perpendicular to the travel rails of the local carrier in a horizontal plane.