Slide System for Optical and Particle Beam Microscopy

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Solution Overview

Problem

Current microscopic examination techniques face challenges in combining optical microscopy and particle beam microscopy, particularly due to the complexity and cost of integrating optical microscopes into vacuum chambers, sample transfer issues, and difficulties in maintaining imaging quality and positioning accuracy between the two methods.

Innovation Solution

A slide system with an electrically conductive holder featuring a window and a slide element for securing the sample, allowing sequential use of optical and particle beam microscopes without the need for a combined microscope, utilizing alignment marks for precise positioning and calibration between the two systems.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a combination microscope integrating optical microscopy and particle beam microscopy is used, then both microscopy methods can be performed on the same system, but the device complexity and manufacturing cost increase significantly

Engineering Contradiction:
Improvecapability to perform both optical and particle beam microscopyVSAvoidcomplexity of integrating optical microscope into vacuum chamber
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The invention divides the microscopy system into separate optical microscope and particle beam microscope devices, each operating independently. The sample is transferred between these separate devices using a specialized holder that maintains sample position and orientation, thereby avoiding the complexity of integrating both microscopy systems into a single vacuum chamber while still enabling both methods to be performed on the same sample.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The holder device is designed with universal functionality to work with both optical microscopes and particle beam microscopes. It includes features such as alignment marks visible to both optical and electron beams, and a design that accommodates standard glass slides, making it compatible with various microscopy systems without requiring integration of the microscope systems themselves.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Adaptability or versatility

If a combination microscope is used, then both microscopy methods are available, but the manufacturing outlay for the optical microscope increases due to vacuum requirements

Engineering Contradiction:
Improvedual microscopy capabilityVSAvoidmanufacturing cost of vacuum-compatible optical microscope
Core Design Contradiction:
Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The system separates the optical microscope from the vacuum environment required for particle beam microscopy. The optical microscope operates in atmospheric conditions using standard components, while the particle beam microscope operates in vacuum. The holder serves as the interface between these two environments, eliminating the need to manufacture expensive vacuum-compatible optical microscope components.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The holder acts as an intermediary device that bridges the atmospheric optical microscope and the vacuum particle beam microscope. It includes a window that allows optical access while maintaining vacuum integrity, and alignment features that enable precise sample positioning in both systems without requiring the optical microscope to be vacuum-compatible.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Ease of manufacture

If the object is transferred from optical microscopy to particle beam microscopy using standard holders, then separate devices can be used, but the transfer is time-consuming and risks sample damage

Engineering Contradiction:
Improveuse of separate microscopy devicesVSAvoidtime required for sample transfer and repositioning
Core Design Contradiction:
Ease of manufactureVSLoss of time

Solution Approach 1:

The holder is pre-prepared with alignment marks and positioning features before sample transfer. These features enable rapid localization and alignment of the sample in the particle beam microscope without time-consuming manual searching or repositioning. The sample remains secured on the holder throughout the transfer process, preventing damage that would occur with manual handling.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The holder maintains a consistent reference frame with alignment marks that serve as a coordinate system across both microscopy systems. This allows the sample position to be effectively 'copied' or transferred from the optical microscope coordinate system to the particle beam microscope coordinate system through the invariant holder references, eliminating the need for time-consuming position recovery.

Inventive Principle:
Principle #26Copying

4Ease of manufacture

If standard holders are used for transferring samples between microscopy systems, then separate devices can be utilized, but precise position recovery becomes difficult due to sample distortion

Engineering Contradiction:
Improvesimplicity of using separate devicesVSAvoidaccuracy of position recovery between microscopy methods
Core Design Contradiction:
Ease of manufactureVSMeasurement precision

Solution Approach 1:

The holder serves as a stable intermediary reference frame that is not affected by sample distortion. Alignment marks are attached to or integrated into the holder itself rather than the sample, so they maintain their positions even when the sample distorts during transfer. This allows precise position recovery by referencing the invariant holder marks rather than the potentially distorted sample features.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The holder provides a homogeneous, stable reference environment for both microscopy systems. The alignment marks and positioning features on the holder remain consistent and unchanged during sample transfer, providing a reliable coordinate system that bridges the two microscopy methods. This homogeneous reference frame compensates for any non-homogeneous distortions that may occur to the sample itself during transfer.

Inventive Principle:
Principle #33Homogeneity

Data Source

PatentUS11454797B2Microscopic examination of an object using a sequence of optical microscopy and particle beam microscopy
Publication Date: 2022.09.27 CARL ZEISS MICROSCOPY GMBH
  • US11454797B2 patent drawing
  • US11454797B2 patent drawing
  • US11454797B2 patent drawing

AI summary

A slide system for optical microscopy using immersion fluid including a cover glass having a first refractive index and a transparent film having a second refractive index. The second refractive index of the transparent film is matched to the first refractive index of the cover glass. The transparent film protects the cover glass from immersion fluid used for optical microscopy and the transparent film is configured such that the immersion fluid used can be removed by lifting off the transparent film.