Sliding Gas Path Seal Structure With Cap-Protected Elastic Body

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Solution Overview

Problem

Existing seal structures for gas flow paths face challenges in maintaining effective sealing while allowing for relative movement between components, leading to potential leakage and damage due to friction and shear stresses.

Innovation Solution

A seal structure comprising a first component, a second component, and an elastic body with a cap that covers the elastic body, allowing for sliding movement without direct contact, absorbing movement through the elastic body's expansion and contraction, and utilizing a material with low friction such as polytetrafluoroethylene for the cap.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the elastic body is directly exposed to sliding components, then followability between components is maintained, but the elastic body suffers from friction and shearing causing breakage and deterioration

Engineering Contradiction:
Improvesealing reliabilityVSAvoidelastic body strength
Core Design Contradiction:
ReliabilityVSStrength

Solution Approach 1:

The cap serves as an intermediary component between the elastic body and the sliding component. It transfers the sliding motion while protecting the elastic body from direct contact, thereby maintaining sealing reliability without compromising elastic body strength through direct friction and shearing

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The sealing system is segmented into distinct functional components: the elastic body for sealing, the cap for sliding contact, and the groove for integration. This segmentation allows each component to perform its specific function optimally - the elastic body maintains sealing without bearing sliding loads

Inventive Principle:
Principle #1Segmentation

2Duration of action of stationary object

If the cap covers the elastic body to protect it from sliding contact, then elastic body deterioration is reduced, but the complexity of the seal structure increases

Engineering Contradiction:
Improveelastic body service lifeVSAvoidseal structure complexity
Core Design Contradiction:
Duration of action of stationary objectVSDevice complexity

Solution Approach 1:

The cap integrates multiple functions into a single component: it protects the elastic body from sliding contact, provides a sliding interface with the moving component, and is embedded in the groove as part of the sealing assembly. This merging reduces overall system complexity compared to having separate protective elements

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The elastic body is nested within the groove, and the cap is nested over the elastic body, creating a compact layered structure. This nesting arrangement maximizes protection while minimizing the overall footprint and complexity of the sealing assembly

Inventive Principle:
Principle #7Nested doll (Nesting)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration reduces the risk of breakage and deterioration of the elastic body while maintaining effective sealing and followability between components, ensuring reliable gas flow path sealing even with relative movement.

Implementation Method 1

the movement of the components toward and away from each other is absorbed by the expansion and contraction of the elastic unit

Methodology Applied
Scientific EffectElasticity: Elasticity

Implementation Method 2

friction and shearing caused by the sliding of the components occur in the cap

Methodology Applied
Scientific EffectFriction: Friction

Data Source

PatentUS11242930B2Seal structure and seal method
Publication Date: 2022.02.08 TOKYO ELECTRON LTD
  • US11242930B2 patent drawing
  • US11242930B2 patent drawing
  • US11242930B2 patent drawing

AI summary

A seal structure includes an elastic body and a cap which are located in a boundary between a first component and a second component that seal and define a gas flow path. The flow path is defined by a first through hole in the first component and a second through hole in the second component, the elastic body has a loop-shaped second opening which overlaps with a first opening of the first through hole, and the cap covers the elastic body such that the first opening, the second opening, and a third opening of the cap overlap with each other. The cap is fitted into a groove in the first surface and is in close contact with the second surface. The cap and second component are in close contact with each other to have slidability.