Sliding Mode Adaptive Engine for Nonlinear Actuator Control

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Solution Overview

Problem

Current adaptive controllers in plasma processing systems lack stability, scalability, and adaptability, particularly when dealing with nonlinear systems, asynchronous actuators, and modeling uncertainties, leading to inefficiencies and premature system failures.

Innovation Solution

An adaptive engine that receives a reference waveform and adjusts actuators using an estimation law module to estimate model parameters, a control law module to generate control signals, and a sliding mode predictor to predict system outputs, enabling precise control of actuators with different response times and handling nonlinearities and uncertainties.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If existing adaptive controllers are used to control actuators with different response times, then control coverage is achieved, but control precision and system stability deteriorate

Engineering Contradiction:
Improvecontrol coverageVSAvoidcontrol precision
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The controller segments the control task by creating separate control loops for each actuator (fast actuator loop and slow actuator loop). Each loop is independently tuned to handle its specific actuator's response characteristics, allowing precise control of each component while maintaining overall system stability.

Inventive Principle:
Principle #1Segmentation

2Power

If rail voltage is held at high level for most of pulse cycle to ensure power availability, then power delivery is guaranteed, but energy dissipation increases and component overheating occurs

Engineering Contradiction:
Improvepower deliveryVSAvoidenergy dissipation
Core Design Contradiction:
PowerVSLoss of energy

Solution Approach 1:

The controller performs preliminary action by pre-charging the rail to the required voltage level only when needed for specific high-power states. The rail voltage is dynamically adjusted in advance of power demands, holding high voltage only during critical intervals rather than continuously, thereby reducing energy dissipation and preventing component overheating.

Inventive Principle:
Principle #10Preliminary action

3Adaptability or versatility

If adaptive controllers handle nonlinear systems and modeling uncertainties, then system robustness is improved, but controller stability and convergence guarantee are lost

Engineering Contradiction:
Improvesystem robustnessVSAvoidcontroller stability
Core Design Contradiction:
Adaptability or versatilityVSStability of the object's composition

Solution Approach 1:

The controller implements feedback mechanisms where the actual system response is continuously monitored and compared with expected behavior. This feedback information is used to adjust control parameters in real-time, ensuring stability and convergence even when handling nonlinear systems and modeling uncertainties. The feedback loop compensates for the lack of theoretical stability guarantees in adaptive control.

Inventive Principle:
Principle #23Feedback

Data Source

PatentUS12197174B2Adaptive engine with sliding mode predictor
Publication Date: 2025.01.14 ADVANCED ENERGY IND INC
  • US12197174B2 patent drawing
  • US12197174B2 patent drawing
  • US12197174B2 patent drawing

AI summary

An adaptive engine and method of adaptive control. The adaptive control method comprises receiving a reference signal, a system output measurement, and a control output. The method also includes applying one or more estimation laws to estimate an estimated model parameter tensor, θ, for a nonlinear model; generating a possible control signal or an internal possible control signal using a control portion of the nonlinear model; receiving a linear time varying system corresponding to the reference signal, and the possible control signal or the internal possible control signal; and generating one or more of a predicted system output and an estimated system output using an estimation portion of the nonlinear model.