Sliding Tool Enclosure for Service Access and EMI Shielding
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Solution Overview
Problem
Existing semiconductor manufacturing tool enclosures are cumbersome to install and disassemble, limiting access for service and maintenance, and are sensitive to external environmental factors like temperature fluctuations, particle pollution, and electromagnetic interference, which affects measurement accuracy and image quality.
Innovation Solution
A sliding enclosure system comprising an inner and outer frame with acoustic dampening panels and wheels for easy access, allowing the outer frame to move relative to the inner frame to open positions for improved accessibility and protection from external influences.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a fixed enclosure structure is used to protect the tool from external environmental factors, then measurement accuracy and image quality are improved, but accessibility for service and maintenance deteriorates
Solution Approach 1:
The enclosure is divided into multiple modular sections that can be independently accessed. The front enclosure section can be removed or opened separately from the rest of the enclosure, allowing service personnel to access the tool without compromising the sealed environment of the main enclosure body.
Solution Approach 2:
The enclosure transitions from a static fixed structure to a dynamic system with movable and removable components. The front section is designed to be dynamically accessible while maintaining the overall sealed structure when closed, enabling flexible service access while preserving environmental protection.
2Measurement precision
If a fixed enclosure structure is used to shield from electromagnetic interference and temperature fluctuations, then measurement accuracy is improved, but system downtime increases
Solution Approach 1:
The enclosure is segmented into a front removable section and a main sealed body. This allows rapid access to the tool for servicing without requiring complete disassembly of the entire enclosure, significantly reducing system downtime while maintaining environmental protection during operation.
Solution Approach 2:
The front enclosure section is pre-configured with quick-release mechanisms and sealing features that enable rapid installation and removal. This preliminary design of easy-access features reduces the time required for service operations while maintaining the sealed environment when closed.
3Ease of operation
If the entire enclosure is disassembled to access tool portions for servicing, then accessibility is improved, but installation and disassembly complexity increases
Solution Approach 1:
The enclosure is divided into modular sections with the front section designed for independent removal. This segmentation eliminates the need to disassemble the entire enclosure structure, reducing both the complexity of assembly and the time required for service access.
Solution Approach 2:
Instead of designing the enclosure to be opened from the inside or requiring complex disassembly, the front section is designed to be removed from the outside in a simple outward motion. This inverted approach to access simplifies the service procedure while maintaining structural integrity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system provides easier access for maintenance and service while maintaining a controlled environment, reducing system downtime and improving measurement accuracy by shielding from electromagnetic interference and temperature fluctuations.
Implementation Method 1
The inner frame may comprise a front wall and a rear wall covering respective front and rear sides of the interior volume. The first section may comprise a first top wall, a first left wall, and a first right wall, and the second section may comprise a second top wall, a second left wall, and a second right wall.
Data Source
AI summary
The system includes a tool disposed in an interior volume. An inner frame having a front wall and a rear wall covers respective front and rear sides of the interior volume, and an outer frame is disposed on the inner frame. The outer frame includes a first section and a second section, each having a top wall, a left wall, and a right wall. In a closed position, the walls of the first section and the second section cover the respective top, left, and right sides of the interior volume, the interior volume is at least partially sealed from the exterior, and the first section is sealed with the second section. The outer frame is movable relative to the inner frame to an open position where at least a portion of the top, left, and right sides of the interior volume are open to the exterior.