Slip Ring With Conductive Sphere And Coil Spring
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Solution Overview
Problem
Existing slip rings in plasma processing apparatuses face issues with toxic mercury leakage in non-contact types and increased contact resistance in contact types, which affect the reliability and efficiency of the electrical connections.
Innovation Solution
A slip ring design featuring a conductive rotor, stator, and sphere with multiple contact points provided by conductive coil springs, reducing contact resistance and extending the lifespan by stabilizing the contact area and minimizing abrasion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a non-contact type slip ring using mercury is used, then electrical connection between rotor and stator is achieved, but the device becomes large due to seal structure and mercury leakage may occur
Solution Approach 1:
The patent removes mercury and its associated seal structure from the slip ring design. Instead of using a non-contact type slip ring with mercury, the invention employs a contact type slip ring with solid conductive materials, eliminating the need for complex sealing mechanisms while maintaining electrical connection reliability
Solution Approach 2:
The patent uses solid conductive materials like copper or graphite for the slip ring contacts, which are replaceable and do not require complex sealing. This approach trades the longevity of mercury for simpler, maintainable components that eliminate leakage risks
2Device complexity
If a contact type slip ring with brush is used, then device size is reduced, but contact resistance increases due to point contact
Solution Approach 1:
The slip ring contact surface is divided into multiple segmented contacts arranged circumferentially. Each segment provides a separate electrical path, and collectively they distribute the electrical load across multiple points, reducing overall contact resistance while maintaining a compact structure
Solution Approach 2:
The patent transitions from point contact (zero-dimensional) to line contact (one-dimensional) or surface contact (two-dimensional) by using circumferential contact rings or bands. This dimensional change increases the effective contact area without significantly increasing device size, thereby reducing contact resistance
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces contact resistance and prolongs the lifespan of the slip ring, enabling stable and efficient electrical connections for plasma processing applications.
Implementation Method 1
The coil spring is conductive, is provided between the sphere and one of the rotor and the stator, and extends in a circumferential direction with respect to the rotation axis. The coil spring comes in contact with the sphere and one of the rotor and the stator.
Data Source
AI summary
Disclosed is a slip ring including: a conductive rotor that is rotatable around a rotation axis; a conductive stator provided coaxially with the rotor; a conductive sphere disposed between the rotor and the stator to form an electric path between the rotor and the stator; and a conductive coil spring provided between the sphere and one of the rotor and the stator and extending in a circumferential direction with respect to the rotation axis to be in contact with the sphere and one of the rotor and the stator.