Slit Nozzle With Reduction Section For Wafer Liquid Dispensing
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Solution Overview
Problem
Conventional slit nozzles are not well-suited for semiconductor wafer processing due to issues with the rapid initiation and cessation of liquid dispensing, reproducibility, and residual liquid droplets, which can damage nano-scale device structures and affect yield rates.
Innovation Solution
A slit nozzle design with a nozzle body featuring a discharge opening of 10-100 mm in length and 0.5-5 mm in width, including a dispensing chamber and liquid distribution chamber in fluid communication, separated by a reduction section with a cross-sectional area at least 20% less than the chambers, and suction openings for efficient liquid distribution and evacuation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Shape
If conventional slit nozzles are used to dispense liquid in a curtain shape, then the liquid distribution pattern is improved, but the rapid initiation and cessation of liquid dispensing cannot be achieved, resulting in residual drops on the wafer surface
Solution Approach 1:
The nozzle internal structure is segmented into multiple chambers (distribution chamber, transition chamber, dispensing chamber) with different cross-sectional areas. This segmentation allows different regions to perform different functions: the distribution chamber receives liquid, the transition chamber with reduced area creates a venturi effect for rapid flow control, and the dispensing chamber delivers the liquid curtain, thereby achieving both shape control and rapid response.
Solution Approach 2:
The cross-sectional area of the nozzle internal passage is changed along the flow direction, with the transition chamber having a smaller cross-sectional area than the distribution and dispensing chambers. This parameter change creates a venturi effect that enables rapid initiation and cessation of liquid flow while maintaining the curtain-shaped dispensing pattern.
2Shape
If conventional slit nozzles are used, then the liquid can be dispensed in a curtain shape, but the liquid flow control is not reproducible from one process iteration to the next
Solution Approach 1:
The segmented chamber design with specific cross-sectional area relationships creates a more stable and reproducible flow control mechanism. The transition chamber acts as a flow regulation element that ensures consistent liquid curtain formation across multiple process iterations, improving manufacturing precision.
Solution Approach 2:
The internal geometry of the nozzle, particularly the transition chamber dimensions relative to the distribution and dispensing chambers, creates a self-regulating flow system. The venturi effect in the transition chamber provides inherent feedback that stabilizes the liquid flow, ensuring reproducible curtain-shaped dispensing across process iterations.
3Quantity of substance
If conventional slit nozzles are used, then the liquid dispensing can occur, but the evacuation of residual liquid is slow and incomplete
Solution Approach 1:
The segmented chamber design with the transition chamber creates a venturi effect that facilitates rapid evacuation of residual liquid. The reduced cross-sectional area in the transition chamber generates a suction effect that quickly removes remaining liquid from the nozzle, improving productivity by enabling faster process cycles.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design ensures consistent liquid shape within one second of activation, rapid and reliable liquid flow control, and effective evacuation of residual liquid, improving reproducibility and preventing damage to semiconductor wafers.
Implementation Method 1
The dispensing chamber and the liquid distribution chamber are in fluid communication with one another and are separated by a reduction section of the nozzle body whose cross-sectional area is at least 20% less than a cross-sectional area of each of the discharge opening and the liquid distribution chamber
Data Source
AI summary
A slit nozzle for dispensing liquid onto a surface of a wafer, comprises a nozzle body having a discharge opening whose length is from 10-100 mm and whose width is from 0.5-5 mm. The nozzle body has a dispensing chamber positioned upstream of the discharge opening and extending to the discharge opening, and a liquid distribution chamber positioned upstream of the dispensing chamber. The dispensing chamber and the liquid distribution chamber are in fluid communication with one another and are separated by a reduction section of the nozzle body whose cross-sectional area is at least 20% less than a cross-sectional area of each of the discharge opening and the liquid distribution chamber.