Slit-scan multi-wavelength confocal lens module for surface profiling
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional confocal microscopy techniques are limited by their ability to inspect only one point on a surface at a time, leading to time-consuming processes and reduced production efficiency due to their monochrome imaging and complex, bulky systems with lower numerical aperture.
Innovation Solution
A slit-scan multi-wavelength confocal lens module utilizing chromatic aberration lenses to split broadband light into continuously linear spectral lights with different focal lengths, enabling full-field surface profiling through axial chromatic dispersion and spatial filtering, which improves measurement speed and system simplicity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional confocal microscopy uses a spatial pinhole to eliminate out-of-focus light and performs point-by-point scanning, then measurement precision is improved, but productivity deteriorates due to time-consuming inspection processes
Solution Approach 1:
The patent divides the single-point illumination into multiple linear scan lines across the surface. Instead of inspecting one point at a time, the system projects multiple scan lines simultaneously, segmenting the measurement process into parallel operations that cover the entire surface area more efficiently while maintaining confocal precision through spatial filtering
Solution Approach 2:
The patent transitions from point-by-point scanning (0D/1D) to linear scan line projection (1D/2D) by introducing a spatial light modulator that can project multiple lines simultaneously. This dimensional expansion allows parallel measurement across the surface, dramatically improving productivity while maintaining measurement precision through the confocal principle
2Measurement precision
If conventional confocal microscopy inspects only one point at a time, then measurement precision is maintained, but loss of time increases due to sequential scanning requirements
Solution Approach 1:
The patent implements continuous useful action by projecting multiple linear scan lines simultaneously across the surface using a spatial light modulator. This allows the measurement process to continue across the entire surface area in parallel rather than sequentially, eliminating idle time between point measurements while maintaining precision through confocal spatial filtering at each location
3Measurement precision
If conventional systems use complex optical setups with lower numerical aperture, then measurement capability is achieved, but device complexity increases and productivity decreases
Solution Approach 1:
The patent enhances the functionality of the optical system by integrating a spatial light modulator that can dynamically project multiple linear scan lines simultaneously. This multi-functional component allows the system to perform both precise confocal measurement and efficient surface coverage, reducing the need for multiple separate systems while maintaining measurement capability and improving productivity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables efficient, high-resolution, three-dimensional surface profiling of entire surfaces, overcoming the limitations of point measurement and complex systems, and enhancing production efficiency by using chromatic aberration lenses to focus light fields on a single plane, thus allowing for online measurement capabilities.
Implementation Method 1
utilizing chromatic aberration lenses to split broadband light into continuously linear spectral lights with different focal lengths
Implementation Method 2
enabling full-field surface profiling through axial chromatic dispersion and spatial filtering
Implementation Method 3
focuses light fields on a single plane, thus allowing for online measurement capabilities
Data Source
AI summary
The present invention provides a slit-scan multi-wavelength confocal lens module, utilizing at least two lenses having chromatic aberration for splitting a broadband light into continuously linear spectral lights having different focal length respectively. The present invention utilizes the confocal lens module employing slit-scan confocal principle and chromatic dispersion techniques and the confocal microscopy with optical sectioning ability and high resolution in spectral dispersion to establish a confocal microscopy method and system with long DOF and high resolution, capable of modulating a broadband light to produce the axial chromatic dispersion and focus on different depths toward an object's surface for obtaining the reflected light spectrum from the surface. Thereafter, the spectrum is spatially filtered by a slit and then a peak position with respect to the filtered spectrum along the scanning line is detected by a spectral image sensing unit for generating the sectional profile of the measured surface.