Slit Valve Thermal Break for Uniform Heat Distribution
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Solution Overview
Problem
Conventional slit valve apparatuses in electronic device manufacturing systems face issues such as uneven heat distribution, gas flow patterns, plasma uniformity, and short seal life, leading to non-uniform processes and high costs due to expensive seals.
Innovation Solution
An improved slit valve apparatus featuring a gate with a sealing surface, a blocker element, and connector members that structurally connect the gate and blocker element, with the blocker element engaging at a second location to block the opening and provide a thermal break, enhancing heat and gas flow uniformity and extending seal life.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional slit valve apparatus is used to seal the chamber opening, then the chamber can be sealed, but the seals have short life due to thermal exposure and non-uniform heat distribution
Solution Approach 1:
The sealing function is divided into two separate components: a gate that seals the opening and a blocker element that blocks the opening at a different location. This segmentation allows the gate to be positioned away from direct thermal exposure while the blocker element absorbs thermal stress, thereby extending seal life and improving heat distribution uniformity.
Solution Approach 2:
The blocker element acts as an intermediary between the heat source and the gate seal. By positioning the blocker element to engage with the chamber wall and block the opening at a second location, it mediates thermal exposure and protects the gate seal from direct thermal damage, extending its operational life.
2Productivity
If a conventional slit valve apparatus is used, then substrate transport can be achieved, but gas flow patterns are non-uniform affecting process quality
Solution Approach 1:
The opening blocking function is segmented into two locations: the gate seals at a first location while the blocker element blocks at a second location spaced from the first. This segmentation creates more uniform gas flow patterns by distributing the flow restriction across two points, improving process quality while maintaining substrate transport efficiency.
3Reliability
If expensive seal materials are used in conventional slit valve apparatus, then seal reliability can be improved, but manufacturing costs increase
Solution Approach 1:
The blocker element is designed as a replaceable component that can be made from less expensive materials since it bears the thermal stress instead of the seal. By sacrificing the blocker element rather than the expensive seal, the system maintains reliability while reducing manufacturing costs.
Solution Approach 2:
The blocker element serves as an intermediary that protects the expensive seal from direct thermal exposure. This allows the use of more cost-effective seal materials while maintaining seal reliability, as the blocker element absorbs the thermal stress that would otherwise degrade the seal.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution improves heat and gas flow uniformity, extends seal life, and reduces costs by minimizing thermal exposure and using less expensive materials, resulting in more consistent and efficient electronic device processing.
Implementation Method 1
the blocker element engaging with and blocking the opening at a second location spaced from the first location... providing a thermal break
Data Source
AI summary
Slit valve apparatuses are described. In one aspect, a slit valve apparatus is disclosed having a gate with at least one sealing surface, a blocker element, and a connector member that structurally connects the gate and the blocker element. Systems and methods including the slit valve apparatus are also disclosed, as are numerous other aspects.