Parallel Optical Axes SLM Array for High Throughput Exposure
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Solution Overview
Problem
Maskless digital projection exposure systems face challenges in achieving throughput comparable to mask-based lithography systems, with small spatial light modulator (SLM) imaging units limiting exposure area size and requiring scanning systems, and traditional mercury arc lamps being unsuitable due to size and heat dissipation issues.
Innovation Solution
Configuring multiple SLM imaging units in an array with compact, efficient solid-state diode lasers and an illumination-projection beam separator that uses a frustrated cube assembly with prisms and a tilted mirror to achieve parallel optical axes, minimizing light loss and enabling high-intensity, uniform illumination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple SLM imaging units are configured in an array, then throughput is improved by allowing synchronized exposures, but device complexity increases due to the need for coordinating multiple units and their optical paths
Solution Approach 1:
The system divides the exposure function into multiple independent SLM imaging units arranged in an array, where each unit can perform exposures simultaneously. This segmentation allows the system to achieve high throughput through parallel processing while maintaining the functional independence of each unit, reducing the coordination complexity compared to a fully integrated system.
Solution Approach 2:
The patent transitions from a single optical path to multiple parallel optical paths by arranging SLM imaging units in an array configuration. This dimensional expansion from one to many parallel channels enables synchronized exposures across multiple units, achieving throughput improvement without requiring complex sequential coordination mechanisms.
2Illumination intensity
If traditional mercury arc lamps are used for illumination, then illumination intensity is sufficient, but the system becomes unsuitable due to size and heat dissipation issues
Solution Approach 1:
The patent replaces the traditional mercury arc lamp illumination system with solid-state diode laser illumination. This substitution eliminates the mechanical and thermal management issues associated with mercury arc lamps while providing sufficient illumination intensity through efficient solid-state light sources that generate minimal heat and require compact housing.
3Volume of moving object
If small SLM imaging units are used, then device size is reduced, but exposure area size is limited requiring scanning systems
Solution Approach 1:
The system segments the exposure function across multiple small SLM imaging units arranged in an array, where each unit handles a portion of the total exposure area. This segmentation allows the use of compact individual units while achieving large overall exposure capacity through parallel operation, eliminating the need for scanning mechanisms.
Solution Approach 2:
The patent combines multiple small SLM imaging units into a unified array configuration that functions as a single high-capacity exposure system. By merging the capabilities of multiple compact units operating in parallel, the system achieves large effective exposure area without requiring individual units to be large or requiring scanning motion.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances throughput by allowing synchronized exposures across multiple units, achieving higher efficiency and reducing costs compared to traditional systems while maintaining high imaging quality and resolution.
Implementation Method 1
The first hypotenuse and the second hypotenuse are facing one another and are separated by an air gap. The tilted mirror is adjacent the second surface and the tilted mirror and the second surface are spaced apart by an air gap.
Implementation Method 2
Configuring multiple SLM imaging units in an array with compact, efficient solid-state diode lasers
Implementation Method 3
a projection module configured to project the illumination light to a substrate
Data Source
AI summary
A spatial light modulator imaging system is disclosed. The system comprises an illumination module configured to provide illumination light representing data patterns to be imaged by the spatial light modulator imaging system, a projection module configured to project the illumination light to a substrate, and an illumination-projection beam separator coupled between the illumination module and the projection module, where the illumination-projection beam separator is configured to receive the illumination light along an illumination optical axis and transmit the illumination light received to the projection module along a projection optical axis, and where the illumination optical axis and the projection optical axis are substantially parallel to each other.