Spatial Light Modulator Calibration Using Correction Factors
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Solution Overview
Problem
Conventional methods for calibrating spatial light modulators using single-value detectors result in significant deviations from the intensity profiles obtained with multi-value detectors, particularly due to the number of channels in each set, leading to inaccuracies in radiation exposure control for imaging applications.
Innovation Solution
A method involving the selection of channel sets, measurement of intensity values, application of correction factors, and adjustment of control levels to minimize deviations, allowing for improved calibration and reduced distortion in intensity profiles.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional calibration methods using single-value detectors are employed, then device complexity is reduced and ease of operation is improved, but measurement precision deteriorates due to significant deviations from multi-value detector intensity profiles
Solution Approach 1:
The patent introduces correction factors as an intermediary element that mediates between the simple single-value detector measurements and the accurate multi-value detector intensity profiles. These correction factors, determined through initial calibration with multi-value detectors, are then applied to subsequent single-value detector measurements to achieve high measurement precision without requiring complex detectors during operation
Solution Approach 2:
The patent performs preliminary calibration using multi-value detectors to establish correction factors before actual imaging operations. This preliminary action captures the intensity profile characteristics and creates lookup tables or correction factors that enable accurate measurements during subsequent operations using simpler single-value detectors, thus achieving high precision without the complexity of multi-value detectors during critical imaging phases
2Measurement precision
If smaller channel sets are used in single-value detector calibration, then calibration time is reduced and productivity is improved, but measurement precision deteriorates due to increased deviation from true intensity profiles
Solution Approach 1:
The patent performs preliminary calibration using multi-value detectors to establish correction factors that account for the deviations introduced by using smaller channel sets with single-value detectors. This preliminary characterization of the system's intensity profile behavior enables subsequent fast calibrations to achieve high precision without requiring time-consuming measurements of all channels
Solution Approach 2:
The patent changes the calibration approach by introducing correction factors that modify the relationship between measured intensity values and actual intensity profiles. By applying these correction factors to measurements from smaller channel sets, the system achieves measurement precision equivalent to full-channel multi-value detector calibration while maintaining the speed advantages of smaller channel sets
3Measurement precision
If larger channel sets are used for initial calibration, then measurement precision is improved through better intensity profile characterization, but calibration time increases and productivity decreases
Solution Approach 1:
The patent performs the time-consuming high-precision calibration using multi-value detectors and larger channel sets only once as a preliminary action to establish correction factors and lookup tables. Subsequent calibrations can use smaller channel sets with these pre-determined correction factors, achieving similar precision with much reduced time investment
Solution Approach 2:
The patent creates a reference intensity profile model through initial comprehensive calibration that serves as a template or copy for subsequent calibrations. Instead of repeating the full high-time-cost calibration process, the system uses the pre-established reference model and applies correction factors to adapt it to current conditions, achieving high precision without the time penalty of full recalibration
Data Source
AI summary
A method for calibrating a spatial light modulator comprising an array of channels includes selecting a plurality of channel sets; operating each of the channel sets to provide corresponding output radiation; providing a detector for measuring the output radiation; determining a plurality of intensity values, each representing an intensity of the output radiation provided by a different one of the channel sets; providing a correction factor for each of the channels sets, wherein each correction factor remains constant during a subsequent recalibration of the spatial light modulator; modifying each determined intensity value in accordance with a corresponding one of the correction factors; determining a difference between one of the modified intensity values and a target intensity value; and reducing the determined difference by adjusting a control level of at least one channel in the channel set corresponding to the one of the modified intensity values.


