Spatial Light Modulator Data Transfer for Stable High-Speed Exposure

The patent divides the drawing data into multiple data blocks and distributes them across multiple first memory groups (e.g., first memory group 1, second memory group 2). Each memory group independently stores and transfers data blocks in parallel, which both reduces total transfer time through concurrent operations and maintains stability through distributed redundancy. If one memory group fails, other groups can still transfer their data blocks.

The patent pre-loads drawing data into multiple first memory groups before the actual exposure process begins. This preliminary action allows the system to prepare multiple data blocks in advance across distributed memory groups, ensuring that during exposure, data can be transferred rapidly and stably without real-time processing delays or single-point bottlenecks.

The patent segments the memory system into multiple independent first memory groups (first memory group 1, second memory group 2, etc.), each handling specific data blocks. This segmentation enables parallel data transfer operations across multiple memory groups simultaneously, dramatically increasing data transfer speed while keeping each individual memory group relatively simple and manageable.

Each first memory group is designed with universal functionality to store and transfer data blocks independently. The memory groups can be uniformly controlled by the control unit, which manages data block allocation and transfer across all groups. This multi-functional design allows the system to achieve high productivity through parallel operations without proportionally increasing control complexity, as the same control mechanisms apply to each memory group.