Spatial Light Modulator Evanescent Light Illumination
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Solution Overview
Problem
Conventional total internal reflection light illumination apparatuses have complex configurations and difficulty in switching illumination conditions for evanescent light, limiting control over polarization state, penetration length, shape, and light intensity.
Innovation Solution
A total internal reflection light illumination apparatus using a spatial light modulator and a calculation unit to generate evanescent light by converging illumination light on the pupil plane of an objective lens, allowing for easy adjustment of polarization state, penetration length, shape, and light intensity through electronic control of lens patterns.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a diffraction diffusion plate is used to generate evanescent light, then the illumination can be achieved, but the configuration becomes complicated due to required mechanical mechanisms
Solution Approach 1:
The patent replaces mechanical mechanisms (diffraction diffusion plate with moving parts) with an optical system consisting of a spatial light modulator and lens pattern generation. The spatial light modulator uses electronic control to modulate light phases and amplitudes, eliminating the need for mechanical movement while achieving the same evanescent light generation function.
Solution Approach 2:
The spatial light modulator serves multiple functions: it generates lens patterns, controls polarization states, adjusts penetration lengths, and shapes illumination patterns. This single device replaces what previously required multiple mechanical components, simplifying the overall system while maintaining versatility.
2Reliability
If conventional light illumination techniques are used, then evanescent light can be generated, but switching illumination conditions becomes difficult
Solution Approach 1:
The spatial light modulator enables dynamic control of illumination conditions through electronic programming. Lens patterns, polarization states, and penetration lengths can be changed rapidly by updating the modulation signals, allowing flexible switching between different illumination modes without mechanical reconfiguration.
Solution Approach 2:
The system controls multiple parameters (polarization state, penetration length, shape, light intensity) by changing the optical path difference and amplitude modulation parameters in the lens pattern. This allows precise electronic adjustment of evanescent light properties to match different observation requirements.
3Illumination intensity
If mechanical mechanisms are used for diffraction diffusion plate, then illumination can be achieved, but the configuration becomes complicated
Solution Approach 1:
The patent replaces mechanical mechanisms (diffraction diffusion plate with moving parts) with an optical system consisting of a spatial light modulator and lens pattern generation. The spatial light modulator uses electronic control to modulate light phases and amplitudes, eliminating the need for mechanical movement while achieving the same evanescent light generation function.
4Adaptability or versatility
If arbitrary control of evanescent light parameters is desired, then various illumination modes can be implemented, but conventional techniques lack this flexibility
Solution Approach 1:
The spatial light modulator serves multiple functions: it generates lens patterns, controls polarization states, adjusts penetration lengths, and shapes illumination patterns. This single device replaces what previously required multiple mechanical components, simplifying the overall system while maintaining versatility.
Solution Approach 2:
The system controls multiple parameters (polarization state, penetration length, shape, light intensity) by changing the optical path difference and amplitude modulation parameters in the lens pattern. This allows precise electronic adjustment of evanescent light properties to match different observation requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables simple and effective operation of evanescent light polarization state, penetration length, shape, and light intensity, facilitating various illumination modes with improved ease of use and configuration.
Implementation Method 1
a spatial light modulator for inputting the illumination light, and converging and outputting the illumination light by presenting a lens pattern
Implementation Method 2
an objective lens for illuminating the object with the light by illuminating an object surface with the illumination light converged and output by the spatial light modulator and thereby causing total reflection
Data Source
AI summary
A total internal reflection light illumination apparatus includes a light source providing illumination light L1, a spatial light modulator inputting the illumination light L1 and converging and outputting the illumination light L1 by presenting a lens pattern, an objective lens illuminating an object substrate with illumination light L2 converged and output by the spatial light modulator, and a calculation unit providing, to the spatial light modulator, the lens pattern corresponding to at least one of a desired polarization state, desired penetration length, desired shape, and desired light intensity of the evanescent light L3. The lens pattern converges the illumination light L2 on a pupil plane of the objective lens.


