Spatial Light Modulator Pixel Segmentation for LiDAR Crosstalk Reduction
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Solution Overview
Problem
Existing spatial light modulators using active meta devices face challenges in achieving precise light control and efficient heat management, leading to suboptimal performance in applications like LiDAR systems.
Innovation Solution
A spatial light modulator design featuring a substrate with openings, where each pixel includes a first reflective layer, a cavity layer, and a second reflective layer with a grating structure, allowing for independent operation and reduced heat transfer between pixels.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If pixels are arranged closely together to increase device area utilization, then device productivity and area efficiency are improved, but heat transfer between pixels increases causing crosstalk and reduced light control precision
Solution Approach 1:
The device divides the pixel array into independently operable pixel units, each with its own reflective layer and cavity structure. This segmentation allows pixels to be arranged closely while maintaining independent optical control, preventing crosstalk between adjacent pixels despite high density arrangement.
Solution Approach 2:
The substrate with openings acts as an intermediary structure between pixels. The openings create physical separation and control heat transfer pathways, allowing pixels to be positioned close together for high area utilization while the substrate structure mediates thermal isolation to prevent crosstalk.
2Measurement precision
If reflective layers and cavity structures are added to improve light emission precision, then light control accuracy is improved, but device complexity and manufacturing difficulty increase
Solution Approach 1:
The reflective layer and cavity structure serve multiple functions simultaneously: they control light emission precision, provide thermal management, and enable independent pixel operation. This multi-functionality reduces the need for additional separate components, thereby limiting the increase in overall device complexity despite improved light control.
Solution Approach 2:
The patent implements a nested structure where the grating structure is positioned within the cavity, which is in turn positioned on the reflective layer, all supported by the substrate. This nested arrangement achieves complex light control functionality while maintaining a compact overall structure and facilitating integrated manufacturing.
3Measurement precision
If pixels are separated to reduce crosstalk and improve light control, then light emission precision is improved, but device area utilization and productivity decrease
Solution Approach 1:
The substrate is designed with non-uniform opening distribution, creating regions of different pixel density. In regions where precise light control is critical, pixels are separated more widely, while in other regions, pixels can be arranged more densely. This local variation in quality allows the device to optimize both light control accuracy and area utilization in different functional zones.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances the precision of light emission and reduces crosstalk between pixels, resulting in improved output quality and efficiency of the spatial light modulator, particularly in LiDAR applications.
Implementation Method 1
Both the HCG and the DBR layer have a high reflectivity for incident light, and thus vertical incident light may be amplified in the cavity and may be emitted vertically
Implementation Method 2
The meta surface of the SLM includes a plurality of high contrast gratings (HCGs)
Data Source
AI summary
Provided are a spatial light modulator, a method of manufacturing the same, and a light detection and ranging (LiDAR) apparatus including the spatial light modulator. The spatial light modulator includes a substrate including an opening, and a plurality of pixels, wherein at least one pixel of the plurality of pixels includes a first reflective layer provided on the substrate, a cavity layer provided on the first reflective layer, and a second reflective layer provided on the cavity layer, the second reflective layer including a grating structure. The plurality of pixels are supported by the substrate and are arranged to be separated from each other.