SLM Registration via Predefined Pattern Reference Film
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing techniques for registering a Digital Micromirror Device (DMD) in nanoimprint lithography are time-consuming and inefficient, making them unsuitable for manufacturing environments.
Innovation Solution
A method involving irradiation of a formable material with a predefined registration pattern using a spatial light modulator (SLM) to generate positional information, determining positional offsets, and adjusting control parameters for rapid and accurate registration of the SLM relative to a template mesa.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If existing techniques are used to register the DMD by turning on and off individual mirrors, then registration accuracy can be achieved, but the registration process becomes time-consuming
Solution Approach 1:
The patent applies preliminary action by pre-defining a registration pattern that includes multiple regions with different mirror states (on/off) before the actual registration process. This predefined pattern allows the system to capture multiple reference points simultaneously in a single exposure, rather than sequentially activating individual mirrors. The formable material is irradiated with this predetermined pattern to create a reference film that encodes spatial information about multiple DMD regions, thereby reducing registration time while maintaining accuracy.
Solution Approach 2:
The patent applies segmentation by dividing the registration pattern into multiple distinct regions (first region, second region, third region, fourth region) with different mirror activation states. Each region provides specific positional information about different portions of the DMD array. By segmenting the registration process into these spatially distributed regions that can be captured simultaneously, the system achieves comprehensive registration without sequential mirror activation, thus reducing overall registration time.
2Measurement precision
If individual mirrors are turned on and off for registration, then precise positioning information can be obtained, but the manufacturing efficiency decreases
Solution Approach 1:
The patent applies continuity of useful action by using a continuous radiation exposure process that captures information from multiple DMD regions simultaneously. Instead of sequentially turning on and off individual mirrors (discontinuous action), the system irradiates the formable material with a predetermined pattern that encompasses multiple regions in a single continuous operation. This creates a reference film that contains positional information from all regions at once, maintaining measurement precision while dramatically improving manufacturing efficiency.
3Productivity
If a predefined registration pattern is used to irradiate formable material, then registration speed increases, but the complexity of the irradiation system increases
Solution Approach 1:
The patent applies copying by using the formable material as a physical copy or replica of the DMD mirror array configuration. The predetermined registration pattern is transferred onto the formable material to create a reference film that copies the spatial arrangement of mirrors in different states. This physical copy contains all the positional information needed for registration, allowing the system to achieve fast registration speeds without requiring complex real-time sensing and actuation systems, thereby managing system complexity while improving productivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly reduces registration time, enabling faster and more precise alignment of the SLM, enhancing productivity in semiconductor fabrication processes.
Implementation Method 1
Light modulation can be performed by a number of techniques, including Digital Micromirror/ Mirror Device (DMD), Liquid Crystal Device (LCD), mirror array, etc.
Implementation Method 2
A radiation source is used to irradiate a formable material in contact with the template to cure the formable material and form a reference film
Data Source
AI summary
A formable material in contact with a template is irradiated to form a reference film using a predefined registration pattern associated with a spatial light modulator (SLM). The reference film is inspected to generate positional information of elements of the SLM relative to an imprint field edge. Positional offset of the elements of the SLM with respect to a holder of the template based on the positional information is determined. Control parameters for the SLM are determined based on the positional offset.