Slotted Lamination Scanning Magnet for Ion Beam Control

Solution Overview

Problem

Conventional ion implantation systems face challenges in efficiently scanning ion beams due to large size and high power requirements of magnetic scanners, which limit the focus and control of the ion beam, especially in high-current applications.

Innovation Solution

The design of a scanning magnet with a ferrous yoke having slotted laminations and a scanner coil to minimize eddy currents and heat buildup, allowing for more efficient magnetic flux guidance and reduced power consumption.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If magnetic scanning is used to scan the ion beam, then scanning capability is achieved, but the scanner size becomes large and power requirements increase

Engineering Contradiction:

Improvescanning capabilityVSAvoidpower requirements

Core Design Contradiction:

Ease of operationVSPower

Solution Approach 1:

The yoke is divided into multiple laminations stacked together, with slots introduced between laminations to interrupt eddy current paths. This segmentation reduces eddy current losses and allows for more efficient magnetic flux guidance, thereby reducing power requirements while maintaining scanning capability

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Slots are strategically positioned in specific regions of the laminations where eddy currents are most problematic. This local modification optimizes magnetic flux distribution in critical areas without compromising overall scanning performance, achieving reduced power consumption while preserving scanning capability

Inventive Principle:

Principle #3Local quality

2Ease of operation

If magnetic scanning is used to scan the ion beam, then scanning capability is achieved, but the scanner size becomes large

Engineering Contradiction:

Improvescanning capabilityVSAvoidscanner size

Core Design Contradiction:

Ease of operationVSArea of stationary object

Solution Approach 1:

The yoke is divided into multiple laminations stacked together, with slots introduced between laminations to interrupt eddy current paths. This segmentation reduces eddy current losses and allows for more efficient magnetic flux guidance, thereby reducing power requirements while maintaining scanning capability

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Slots are strategically positioned in specific regions of the laminations where eddy currents are most problematic. This local modification optimizes magnetic flux distribution in critical areas without compromising overall scanning performance, achieving reduced power consumption while preserving scanning capability

Inventive Principle:

Principle #3Local quality

3Loss of energy

If conventional laminations are used in the yoke, then magnetic flux guidance is provided, but eddy currents cause heat buildup and energy loss

Engineering Contradiction:

Improveeddy current lossesVSAvoidheat buildup

Core Design Contradiction:

Loss of energyVSTemperature

Solution Approach 1:

The yoke is divided into multiple laminations stacked together, with slots introduced between laminations to interrupt eddy current paths. This segmentation reduces eddy current losses and allows for more efficient magnetic flux guidance, thereby reducing power requirements while maintaining scanning capability

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The slots in the laminations, which might seem to disrupt magnetic flux, actually serve to interrupt harmful eddy current paths while allowing beneficial magnetic flux to pass through. This converts the potential harm of slots disrupting flux into the benefit of reducing eddy current losses and heat buildup

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the scanning efficiency and reduces power requirements, enabling more precise and cost-effective ion beam scanning in ion implantation systems.

Implementation Method 1

a scanner coil configured to generate a magnetic field to control a path of the ion beam

Methodology Applied

Scientific EffectMagnetic field: Magnetic Field

Implementation Method 2

a ferrous yoke having slotted laminations and a scanner coil to minimize eddy currents and heat buildup

Methodology Applied

Scientific EffectEddy currents: Eddy Currents

Data Source

PatentUS11114270B2Scanning magnet design with enhanced efficiency

Publication Date: 2021.09.07 AXCELIS TECHNOLOGIES INC

AI summary

A scanning magnet is positioned downstream of a mass resolving magnet of an ion implantation system and is configured to control a path of an ion beam downstream of the mass resolving magnet for a scanning or dithering of the ion beam. The scanning magnet has a yoke having a channel defined therein. The yoke is ferrous and has a first side and a second side defining a respective entrance and exit of the ion beam. The yoke has a plurality of laminations stacked from the first side to the second side, wherein at least a portion of the plurality of laminations associated with the first side and second side comprise one or more slotted laminations having plurality of slots defined therein.