Slow-Close Shutoff Valve for Pyrophoric Flow Shock Control
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Solution Overview
Problem
Fluid systems used in semiconductor processing often face issues with pyrophoric materials that can form metastable masses outside the system, which may rapidly deflagrate or detonate when disturbed, posing risks of injury and equipment damage due to shock from shutoff mechanisms.
Innovation Solution
A flow control arrangement featuring a shutoff valve with a slow-close actuator and a pyrophoric material detector, which progressively closes the valve to minimize shock to metastable masses and includes an inert fluid supply to offset pressure changes, preventing deflagration or detonation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If a rapid shutoff valve is used to quickly stop pyrophoric material flow upon detecting fire or leakage, then the response time to emergency situations is improved, but the shock communicated to metastable masses may trigger deflagration or detonation
Solution Approach 1:
The valve closing speed is made dynamic rather than fixed. The system automatically adjusts the closing speed based on real-time detection: rapid closing when no metastable mass is present (emergency response), and slow closing when a metastable mass is detected (safety prevention). This dynamic adaptation resolves the contradiction between speed and safety.
Solution Approach 2:
The closing time parameter of the shutoff valve is changed from a fixed rapid value to a variable parameter that can be adjusted between rapid and slow modes. This parameter change allows the system to optimize between response speed and shock minimization depending on the detected condition.
2Object-affected harmful factors
If a slow-close actuator is used to gradually close the shutoff valve to prevent deflagration, then the shock to metastable masses is reduced, but the response time to emergency situations increases
Solution Approach 1:
The valve closing speed is made dynamic rather than fixed. The system automatically adjusts the closing speed based on real-time detection: rapid closing when no metastable mass is present (emergency response), and slow closing when a metastable mass is detected (safety prevention). This dynamic adaptation resolves the contradiction between speed and safety.
Solution Approach 2:
The pyrophoric material detector provides feedback about the presence of metastable masses to the controller. This feedback loop enables the system to automatically select the appropriate closing mode (rapid or slow) based on current conditions, resolving the time-safety contradiction through intelligent control.
3Reliability
If emergency shutoff valves are actuated rapidly upon detecting fire or flame, then the fire response effectiveness is improved, but the pressure wave may trigger deflagration of metastable masses
Solution Approach 1:
The system performs preliminary detection of metastable masses before actuating the shutoff valve. This preliminary action allows the controller to pre-select the appropriate closing mode (rapid or slow) based on the detected condition, preventing deflagration before it can occur while maintaining reliable fire response.
Solution Approach 2:
The pyrophoric material detector provides feedback about the presence of metastable masses to the controller. This feedback loop enables the system to automatically select the appropriate closing mode (rapid or slow) based on current conditions, resolving the time-safety contradiction through intelligent control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively limits the risk of deflagration or detonation by gradually closing the shutoff valve and introducing inert fluid, ensuring safer handling of pyrophoric materials in semiconductor processing systems.
Implementation Method 1
limit a shock communicated to the metastable mass by closing of the shutoff valve to prevent deflagration or detonation of the metastable mass
Implementation Method 2
pyrophoric material detector operably connected to the slow-close actuator and configured to close the shutoff valve upon detection of a metastable mass of a pyrophoric material
Implementation Method 3
introducing an inert fluid into the pyrophoric fluid traversing the shutoff valve during the slow-close interval to offset pressure changes
Data Source
AI summary
A flow control arrangement includes a source conduit, a supply conduit, a shutoff valve, and a slow-close actuator. The shutoff valve connects the source conduit to the supply conduit. The slow-close actuator is connected to the shutoff valve to close the shutoff valve during a slow-close interval, the pyrophoric material detector is operably connected to the slow-close actuator to close the shutoff valve upon detection of a metastable mass of a pyrophoric material outside of the flow control arrangement, and the slow-close interval is sized to limit shock communicated to the metastable mass by closing of the shutoff valve and prevent rapid deflagration or detonation of the metastable mass of the pyrophoric material. Semiconductor processing systems including the flow control arrangement and related flow control methods are also described.