SLS Focal Calibration via Optical Reflection Analysis
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Solution Overview
Problem
Conventional methods for calibrating the focal position of sequential lateral solidification (SLS) systems are time-consuming, prone to human error, and risk substrate damage due to manual visual inspection, which is subjective and inconsistent.
Innovation Solution
A system that forms a test pattern on a substrate with varying focal plane positions, records data, and uses an optical detector to analyze reflections from an inspection light beam to determine the optimal focal position for calibration, allowing for automated or manual calibration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual visual inspection is used to determine focal position, then calibration can be performed, but the process is time-consuming and prone to human error
Solution Approach 1:
The patent replaces the manual visual inspection method with an automated optical detection system. A camera captures images of test patterns at different focal positions, and image processing algorithms automatically analyze these images to determine the optimal focal position. This substitution of mechanical/manual operations with automated optical and computational systems eliminates human error and significantly reduces calibration time while maintaining or improving measurement precision.
2Ease of operation
If substrate removal for inspection is required, then visual examination can be performed, but the risk of substrate damage increases significantly
Solution Approach 1:
The patent introduces an optical intermediary system consisting of a camera and image processing apparatus that acts as a mediator between the substrate and the inspector. Instead of directly examining the substrate by removing it, the system captures optical images of the test patterns on the substrate and analyzes these images computationally. This intermediary approach allows thorough inspection while the substrate remains in place, completely eliminating the risk of damage associated with physical handling and removal.
3Extent of automation
If human operators perform visual inspection, then focal plane can be selected, but the results are inconsistent and subjective
Solution Approach 1:
The patent implements a feedback-based automated calibration system where the camera captures test pattern images at various focal positions, the image processing algorithm analyzes these images to objectively determine focal position based on quantitative criteria (such as sharpness or contrast metrics), and the system automatically selects the optimal focal position. This closed-loop feedback mechanism replaces subjective human judgment with objective, repeatable computational analysis, ensuring consistent and reliable calibration results across different operations and operators.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate and efficient calibration of the SLS system without substrate removal, reducing human error and damage, and providing consistent results.
Implementation Method 1
The reflection of the inspection light beam is detected by an optical detector. The data processing system analyzes the data gathered concerning the reflection and determines whether the reflected light is substantially specular or substantially scattered.
Implementation Method 2
The data processing system analyzes the data gathered concerning the reflection and determines whether the reflected light is substantially specular or substantially scattered.
Data Source
AI summary
A system and method for calibrating the focal position of the imaging plane of a sequential lateral solidification (SLS) system. A test pattern is formed on a test substrate while varying the z-position of the focal position. Information concerning the z-position of the focal position is stored by a data processing system for various positions in the test pattern. An inspection light beam is directed onto the test pattern at a predetermined angle. The reflection of the inspection light beam is detected by an optical detector. The data processing system analyzes the reflection and determines whether the reflected light is substantially specular or substantially scattered. The data processing system uses the analysis of the reflected light and the information concerning the z-position of the focal position to select an optimal focal position for calibrating the SLS system.