Semiconductor Slurry Blending Tank Layout for Fast, Consistent Output
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current semiconductor slurry blending tools are inefficient, requiring significant time and leading to imprecise and inconsistent slurry production, which negatively impacts semiconductor processing schedules and quality.
Innovation Solution
A high-throughput, precise semiconductor slurry blending tool is designed with a blending tank, inlet pipes that vertically enter without contacting the tank, a blending pump partially within the tank, and a single outlet pipe for slurry removal, enhancing efficiency and precision.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If current semiconductor slurry blending tools are used, then slurry production can be maintained, but cycle times are significantly long (weeks) and production consistency is poor
Solution Approach 1:
The blending system is segmented into multiple independent blending tanks (first blending tank, second blending tank) that can operate simultaneously. Each tank has its own inlet pipes, blending pump, and outlet pipe configuration, allowing parallel production of slurries with different compositions without cross-contamination, thereby reducing overall cycle time while maintaining consistent quality through standardized modular design
Solution Approach 2:
The system performs preliminary actions by pre-configuring multiple blending tanks with specific inlet pipe arrangements and blending pump settings before production begins. Materials are pre-positioned in the tanks, and the blending parameters are pre-established, enabling immediate high-speed production without extended setup time, thus reducing cycle time from weeks to one day while ensuring consistent slurry quality
2Loss of time
If current blending procedures are used, then slurry production is possible, but cycle times extend to weeks impacting processing schedules
Solution Approach 1:
The system maintains continuous useful action through parallel operation of multiple blending tanks. While one tank is being filled with materials, another is actively blending, and a third is being prepared. The inlet pipes are configured to allow simultaneous material addition without interrupting the blending process, eliminating idle time and achieving continuous high-rate slurry production that reduces cycle time to one day
Solution Approach 2:
The system employs dynamic control through adjustable blending pump flow rates and variable speed agitation. The blending pump can dynamically adjust its operation based on real-time slurry viscosity and material feed rate, optimizing the blending process speed without sacrificing quality. This dynamic adaptation enables the system to maintain high productivity while minimizing cycle time
3Adaptability or versatility
If traditional slurry blending is used, then basic production is achieved, but modification time for different slurries requires seven to forty days
Solution Approach 1:
The system is segmented into modular blending tanks that can be independently configured for different slurry types. Each tank can be quickly cleaned and reconfigured without affecting other tanks, allowing rapid switching between different slurry formulations. The modular design with standardized inlet pipes and blending pumps enables adaptation to new slurry types in one day rather than seven to forty days
Solution Approach 2:
The blending system is designed with universal components that can handle multiple slurry types. The inlet pipes are configured to accommodate different material viscosities and particle sizes, and the blending pumps can adjust their parameters for various slurry compositions. This multi-functionality allows the same equipment to produce different slurry types without extensive modification, achieving high adaptability with minimal downtime
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The tool significantly reduces cycle times, allowing for high-quality slurry production within one day, compared to weeks in current systems, thereby improving semiconductor processing flexibility and reducing costs.
Implementation Method 1
a blending pump partially provided within the blending tank and to blend the one or more materials into the slurry
Data Source
AI summary
A slurry blending tool may include a blending tank to receive and blend one or more materials into a slurry, and at least one inlet pipe connected to the blending tank and to provide the one or more materials to the blending tank. The at least one inlet pipe may vertically enter the blending tank and may not contact the blending tank. The slurry blending tool may include a blending pump partially provided within the blending tank and to blend the one or more materials into the slurry. The slurry blending tool may include an outlet pipe connected to the blending pump and to remove the slurry from the blending tank.