Slurry Cooling Device with External Chiller Lines
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing slurry supply systems for semiconductor processing face contamination issues due to leakage of cooling water in chiller lines, which affects the quality of polished wafers and is difficult to detect visually.
Innovation Solution
A slurry cooling device is integrated into the slurry supply system, featuring a slurry cooling unit with a cooling water circulation pipe and tube pipes that branch the slurry flow, allowing for efficient cooling and visible detection of leaks, preventing contamination and ensuring consistent slurry quality.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If chiller lines are installed inside slurry tanks to cool the slurry, then the cooling efficiency is improved, but the risk of leakage and contamination increases
Solution Approach 1:
The cooling function is extracted from the slurry tank interior and relocated to the exterior piping system. The chiller lines are moved from inside the slurry tank to external pipes that connect to the slurry supply line, eliminating the risk of internal leakage while maintaining cooling capability through external heat exchange.
Solution Approach 2:
A cooling water circulation system is introduced as an intermediary between the slurry and the cooling mechanism. The cooling water flows through external pipes, absorbing heat from the slurry through the pipe walls without direct contact, thus preventing contamination while achieving effective cooling.
2Stability of the object's composition
If chiller lines are fixed inside slurry tanks, then the cooling structure is stabilized, but the lines are prone to breakage from friction
Solution Approach 1:
The chiller lines are extracted from the unstable internal environment of the slurry tank where they suffered friction and breakage, and relocated to a stable external piping system. This eliminates the mechanical stress and friction issues while maintaining the cooling function through proper pipe routing and support structures.
3Temperature
If cooling water leaks inside the slurry tank, then the slurry becomes contaminated, but the leakage cannot be detected visually
Solution Approach 1:
The cooling water circulation system is extracted from the opaque slurry tank interior and relocated to external visible piping. This allows operators to visually monitor the cooling water flow and immediately detect any leakage or abnormal conditions in the transparent or accessible external pipes, while the slurry tank maintains its operational integrity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively cools the slurry without contaminating it and allows for immediate visual detection of leaks, maintaining the quality of the polished wafers by preventing cooling water leakage into the slurry.
Implementation Method 1
a cooling water circulation pipe coupled to the first and second body units to surround outer sides of the plurality of tube pipes and configured to circulate cooling water therein
Data Source
AI summary
According to the present invention, there is provided a slurry supply system including: a slurry mixing unit configured to mix slurry; a slurry supply unit in which the slurry mixed in the slurry mixing unit is stored and configured to supply the slurry to a polishing apparatus; a pipe configured to connect the slurry mixing unit and the slurry supply unit; and a slurry cooling unit installed in at least one of pipes configured to connect the slurry supply unit and the polishing apparatus to cool down the mixed slurry.