Slurry Filter Replacement Robot for CMP Chemical Exposure Reduction
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Solution Overview
Problem
Manual replacement of slurry filters in semiconductor CMP processes is inefficient, time-consuming, and poses risks to operators due to chemical handling, leading to potential contamination and equipment damage.
Innovation Solution
A slurry filter replacement robot equipped with manipulators, a support frame, a loader, and a mover, which automates the process of replacing used filters with new ones, minimizing human exposure and reducing contamination and equipment damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If manual replacement of slurry filter is performed by operator, then replacement task can be completed, but operator is exposed to chemical danger and contamination risk increases
Solution Approach 1:
The slurry filter replacement robot performs the replacement task autonomously without human intervention. The robot includes a manipulator that automatically grasps the slurry filter, a loader that supplies new filters, and a mover that positions the robot, enabling the system to service itself and eliminate chemical exposure risks to operators
Solution Approach 2:
The patent replaces the manual mechanical operation with an automated robotic system. The manipulator uses robotic gripping mechanisms instead of human hands, and the entire replacement process is controlled by a control unit, substituting human mechanical action with automated mechanical systems to improve safety
2Productivity
If manual replacement of slurry filter is performed, then filter can be replaced, but replacement time is significant and efficiency is low
Solution Approach 1:
The robot autonomously performs the complete replacement sequence including moving to the operating station, grasping the old filter, coordinating with the loader to receive a new filter, and installing it. This self-service capability eliminates manual intervention time and significantly improves replacement efficiency
Solution Approach 2:
The robot maintains continuous operation during the replacement process without idle manual preparation or tool handling delays. The coordinated movement between the manipulator, loader, and mover enables seamless transition from removing the old filter to installing the new one, maximizing productive action throughout the cycle
3Ease of manufacture
If manual replacement is performed with separate tools, then filter replacement is possible, but additional contamination and equipment damage may occur
Solution Approach 1:
The patent combines the filter grasping function, tool-free manipulation capability, and cleaning function into an integrated robotic system. The manipulator is designed to handle the slurry filter directly without requiring separate tools, and the cleaning device is integrated into the robot to immediately address any contamination, reducing overall harm
4Extent of automation
If robot automates filter replacement, then operator safety improves and efficiency increases, but device complexity increases
Solution Approach 1:
The robotic system is divided into distinct functional modules: a manipulator for grasping and handling the filter, a loader for supplying new filters, a mover for positioning, and a cleaning device for contamination control. Each module performs a specific function, making the overall complex system manageable through functional segmentation
Data Source
AI summary
A slurry filter replacement robot for replacing a first filter at an operating station includes one or more manipulators, a support frame disposed in a lower portion of the one or more manipulators and configured to support the one or more manipulators, a loader coupled with the support frame and configured to load the first filter and a second filter thereon, and a mover disposed in a lower portion of the support frame and configured to move the support frame. Each of the one or more manipulators includes an arm and a robot tool coupled with a first side of the arm. Each of the one or more manipulators is configured to replace the first filter disposed on the operating station with the second filter loaded on the loader.