SMA Coolant Valve for Sensorless Process Flow Modulation
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current servo-controlled valves for modulating process coolant flow in semiconductor manufacturing are costly and complex, requiring external sensors, control logic, and actuators, as well as time-consuming parameter tuning, which increases energy consumption and operational expenses.
Innovation Solution
A self-sensing and self-actuating valve using a shape memory alloy (SMA) spring to variably control coolant flow based on temperature, eliminating the need for external sensors and energy sources, and allowing for both continuous and step adjustments in flow rate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If servo-controlled valves are used to modulate coolant flow, then flow control precision is improved, but device complexity increases due to sensors, control logic, and actuators
Solution Approach 1:
The valve uses the coolant itself as the sensing medium. The coolant flow directly actuates the valve mechanism through pressure differential, eliminating the need for external sensors and control systems. The system serves itself by using the process fluid to both cool and control the valve position.
Solution Approach 2:
The patent replaces complex electronic control systems (sensors, actuators, control logic) with a simple mechanical pressure-differential mechanism. The valve uses purely mechanical means to sense flow conditions and adjust positioning, substituting electronic complexity with elegant mechanical simplicity.
2Ease of operation
If servo-controlled valves are used to modulate coolant flow, then flow control capability is improved, but energy consumption increases due to actuators and control systems
Solution Approach 1:
The valve requires no external energy source. The coolant flow itself provides the actuating force through pressure differential, making the system energy-autonomous. The moving parts are driven entirely by the thermal hydraulic conditions of the process itself.
Solution Approach 2:
The valve utilizes hydraulic principles where coolant pressure differential directly drives the actuation mechanism. The fluid pressure itself becomes the actuating force, eliminating the need for electrical actuators and external power sources.
3Measurement precision
If servo-controlled valves are used to modulate coolant flow, then flow modulation precision is improved, but time consumption increases due to parameter tuning
Solution Approach 1:
The valve automatically adapts to process conditions without requiring manual parameter tuning. The mechanical design inherently provides the optimal control characteristics for the specific application, eliminating time-consuming commissioning and tuning procedures.
Solution Approach 2:
The valve design incorporates fixed geometric parameters (orifice sizes, chamber volumes) that are optimized for the specific application during manufacturing. These parameters are predetermined and require no field adjustment, allowing immediate operational readiness.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The SMA-enabled valve reduces complexity and energy consumption by mechanically modulating coolant flow, conserving heat energy and operating efficiently in various coolant types and corrosive environments without external energy reliance.
Implementation Method 1
a shape memory alloy (SMA) spring positioned on the plunger between the bias spring and the tip, the SMA spring attached to the tip to variably withdraw the tip from the second inlet in response to a rise in temperature of the coolant above a threshold temperature value
Data Source
AI summary
A cooling system includes a coolant source to cool down components of a processing chamber and a return line for the coolant coupled between the processing chamber and the coolant source. The return line has a valve, which includes a flow compartment having a first inlet and an outlet that support a default flow rate of the coolant, the flow compartment also having a second inlet. The valve has a plunger with a tip to variably open and close the second inlet to vary a flow rate of the coolant from the default flow rate. The valve has a shape memory alloy (SMA) spring positioned on the plunger between a side of the valve and the tip, the SMA spring attached to the tip to variably withdraw the tip from the second inlet in response to a rise in temperature of the coolant above a threshold temperature value.