Shape Memory Alloy Valve for Passive Coolant Flow Modulation

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Solution Overview

Problem

Semiconductor fabrication plants face high energy consumption due to the use of active valves for coolant flow modulation, which consumes significant electricity, and there is a need for components that reduce energy usage without relying on electricity.

Innovation Solution

A temperature actuated valve using shape memory alloy springs that automatically open and close based on coolant temperature, eliminating the need for external sensors or power sources, allowing for passive modulation of coolant flow.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If active valves with sensors and power sources are used for coolant flow modulation, then flow control precision is improved, but energy consumption increases

Engineering Contradiction:

Improveflow control precisionVSAvoidenergy consumption

Core Design Contradiction:

Measurement precisionVSUse of energy by moving object

Solution Approach 1:

The valve utilizes the thermal energy of the coolant itself to actuate the shape memory alloy springs, eliminating the need for external power sources. The coolant's own temperature provides the actuation energy, making the system self-servicing and energy-autonomous.

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

The patent replaces traditional electromechanical valve actuation systems (motors, solenoids, sensors) with a passive thermal-mechanical system using shape memory alloy springs that respond directly to temperature changes, eliminating complex mechanical and electrical components.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Measurement precision

If active components are used for valve operation, then control accuracy is improved, but device complexity increases

Engineering Contradiction:

Improvecontrol accuracyVSAvoiddevice complexity

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The invention extracts and removes all active components (sensors, power sources, control electronics) from the valve system, retaining only the passive shape memory alloy springs and mechanical valve structure, thereby simplifying the device while maintaining functionality.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The valve exploits changes in the physical state of the shape memory alloy springs in response to temperature parameter changes, allowing the material to transition between different mechanical properties and trigger valve actuation through thermal parameter variation alone.

Inventive Principle:

Principle #35Parameter changes

3Temperature

If coolant flow is continuously circulated, then cooling effectiveness is maintained, but energy consumption increases

Engineering Contradiction:

Improvecooling effectivenessVSAvoidenergy consumption

Core Design Contradiction:

TemperatureVSUse of energy by moving object

Solution Approach 1:

The valve enables periodic or intermittent coolant circulation by accumulating thermal energy in the shape memory alloy springs until the actuation temperature is reached, then releasing stored energy to open the valve and discharge accumulated coolant, creating a cyclic flow pattern that reduces continuous pumping energy requirements.

Inventive Principle:

Principle #19Periodic action

Solution Approach 2:

The system pre-cools or pre-heats coolant in accumulation chambers before release, allowing the coolant to reach optimal temperature conditions before being discharged, thereby improving cooling effectiveness while reducing the need for continuous high-energy circulation.

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution reduces energy consumption and operating costs by adjusting coolant flow without active components, achieving energy savings and minimizing environmental impact.

Implementation Method 1

at least one temperature actuated member comprising a first end seated against a base of the stationary member and a second end seated against a base of the movable member, wherein the at least one temperature actuated member comprises a shape memory alloy

Methodology Applied

Scientific EffectShape memory alloy: Shape Memory Alloy

Data Source

PatentUS11913563B2Temperature actuated valve and methods of use thereof

Publication Date: 2024.02.27 APPLIED MATERIALS INC

AI summary

Disclosed herein is a temperature actuated valve, including a stationary member and a movable member, wherein the stationary member is configured to receive the movable member. A first flow path is defined between an outer surface of the stationary member and an inner surface of a housing and a second flow path defined by and within the movable member. The temperature actuated valve further includes at least one temperature actuated member having a first end seated against a base of the stationary member and a second end seated against a base of the movable member. The temperature actuated valve further includes a bias member having a first end connected to the base of the stationary member and a second end connected to the base of the movable member, the at least one temperature actuated member configured to compress at a first temperature and expand at a second temperature.